JPH0424436B2 - - Google Patents
Info
- Publication number
- JPH0424436B2 JPH0424436B2 JP59042744A JP4274484A JPH0424436B2 JP H0424436 B2 JPH0424436 B2 JP H0424436B2 JP 59042744 A JP59042744 A JP 59042744A JP 4274484 A JP4274484 A JP 4274484A JP H0424436 B2 JPH0424436 B2 JP H0424436B2
- Authority
- JP
- Japan
- Prior art keywords
- titanium nitride
- nitric acid
- nitride film
- corrosion
- aqueous solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 32
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 21
- 229910017604 nitric acid Inorganic materials 0.000 claims description 21
- 230000007797 corrosion Effects 0.000 claims description 15
- 238000005260 corrosion Methods 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 14
- 239000007864 aqueous solution Substances 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 9
- 239000010935 stainless steel Substances 0.000 claims description 9
- 229910001220 stainless steel Inorganic materials 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims 2
- 229910002061 Ni-Cr-Al alloy Inorganic materials 0.000 claims 1
- 229910001347 Stellite Inorganic materials 0.000 claims 1
- AHICWQREWHDHHF-UHFFFAOYSA-N chromium;cobalt;iron;manganese;methane;molybdenum;nickel;silicon;tungsten Chemical compound C.[Si].[Cr].[Mn].[Fe].[Co].[Ni].[Mo].[W] AHICWQREWHDHHF-UHFFFAOYSA-N 0.000 claims 1
- 238000000576 coating method Methods 0.000 description 14
- 239000011248 coating agent Substances 0.000 description 12
- 238000007654 immersion Methods 0.000 description 8
- 238000007733 ion plating Methods 0.000 description 7
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 6
- 239000000243 solution Substances 0.000 description 5
- 229910010421 TiNx Inorganic materials 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 239000002519 antifouling agent Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- FGHSTPNOXKDLKU-UHFFFAOYSA-N nitric acid;hydrate Chemical compound O.O[N+]([O-])=O FGHSTPNOXKDLKU-UHFFFAOYSA-N 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59042744A JPS60187681A (ja) | 1984-03-06 | 1984-03-06 | 窒化チタン被膜の除去方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59042744A JPS60187681A (ja) | 1984-03-06 | 1984-03-06 | 窒化チタン被膜の除去方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60187681A JPS60187681A (ja) | 1985-09-25 |
| JPH0424436B2 true JPH0424436B2 (zh) | 1992-04-27 |
Family
ID=12644522
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59042744A Granted JPS60187681A (ja) | 1984-03-06 | 1984-03-06 | 窒化チタン被膜の除去方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60187681A (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103194756A (zh) * | 2013-04-26 | 2013-07-10 | 南开大学 | 一种氮化钛膜层的退镀方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108588728A (zh) * | 2018-05-16 | 2018-09-28 | 深圳仕上电子科技有限公司 | 利用硝酸水溶液剥离工件表面膜的方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5941479A (ja) * | 1982-08-31 | 1984-03-07 | Citizen Watch Co Ltd | 窒化チタン被膜の除去方法 |
-
1984
- 1984-03-06 JP JP59042744A patent/JPS60187681A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5941479A (ja) * | 1982-08-31 | 1984-03-07 | Citizen Watch Co Ltd | 窒化チタン被膜の除去方法 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103194756A (zh) * | 2013-04-26 | 2013-07-10 | 南开大学 | 一种氮化钛膜层的退镀方法 |
| CN103194756B (zh) * | 2013-04-26 | 2016-02-17 | 南开大学 | 一种氮化钛膜层的退镀方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60187681A (ja) | 1985-09-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |