JPH0419697B2 - - Google Patents

Info

Publication number
JPH0419697B2
JPH0419697B2 JP57054285A JP5428582A JPH0419697B2 JP H0419697 B2 JPH0419697 B2 JP H0419697B2 JP 57054285 A JP57054285 A JP 57054285A JP 5428582 A JP5428582 A JP 5428582A JP H0419697 B2 JPH0419697 B2 JP H0419697B2
Authority
JP
Japan
Prior art keywords
layer
photosensitive resin
resin film
film
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57054285A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58171818A (ja
Inventor
Kazuhiko Tsuji
Masaru Sasako
Koichi Kugimya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP5428582A priority Critical patent/JPS58171818A/ja
Publication of JPS58171818A publication Critical patent/JPS58171818A/ja
Publication of JPH0419697B2 publication Critical patent/JPH0419697B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/095—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having more than one photosensitive layer

Landscapes

  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP5428582A 1982-03-31 1982-03-31 半導体装置の製造方法および半導体装置の製造装置 Granted JPS58171818A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5428582A JPS58171818A (ja) 1982-03-31 1982-03-31 半導体装置の製造方法および半導体装置の製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5428582A JPS58171818A (ja) 1982-03-31 1982-03-31 半導体装置の製造方法および半導体装置の製造装置

Publications (2)

Publication Number Publication Date
JPS58171818A JPS58171818A (ja) 1983-10-08
JPH0419697B2 true JPH0419697B2 (enrdf_load_stackoverflow) 1992-03-31

Family

ID=12966286

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5428582A Granted JPS58171818A (ja) 1982-03-31 1982-03-31 半導体装置の製造方法および半導体装置の製造装置

Country Status (1)

Country Link
JP (1) JPS58171818A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6236823A (ja) * 1985-08-10 1987-02-17 Fujitsu Ltd レジストパタ−ン形成方法
JPH0263056A (ja) * 1988-04-05 1990-03-02 Mitsubishi Kasei Corp レジストパターン形成方法
US4904564A (en) * 1988-06-16 1990-02-27 International Business Machines Corporation Process for imaging multi-layer resist structure

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51129190A (en) * 1975-05-02 1976-11-10 Fujitsu Ltd Manufacturing method of semiconductor
JPS5411701U (enrdf_load_stackoverflow) * 1977-06-23 1979-01-25
JPS5580323A (en) * 1978-12-12 1980-06-17 Nec Corp Pattern forming method for photoresist-film
JPS57100428A (en) * 1980-12-16 1982-06-22 Matsushita Electronics Corp Method for photomechanical process
JPS58132926A (ja) * 1982-02-03 1983-08-08 Matsushita Electric Ind Co Ltd パタ−ン形成方法

Also Published As

Publication number Publication date
JPS58171818A (ja) 1983-10-08

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