JPH0415882B2 - - Google Patents

Info

Publication number
JPH0415882B2
JPH0415882B2 JP60278811A JP27881185A JPH0415882B2 JP H0415882 B2 JPH0415882 B2 JP H0415882B2 JP 60278811 A JP60278811 A JP 60278811A JP 27881185 A JP27881185 A JP 27881185A JP H0415882 B2 JPH0415882 B2 JP H0415882B2
Authority
JP
Japan
Prior art keywords
width
cladding
substrate
signal
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60278811A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62137504A (ja
Inventor
Susumu Okazaki
Arata Nemoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Sumitomo Special Metals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Special Metals Co Ltd filed Critical Sumitomo Special Metals Co Ltd
Priority to JP27881185A priority Critical patent/JPS62137504A/ja
Publication of JPS62137504A publication Critical patent/JPS62137504A/ja
Publication of JPH0415882B2 publication Critical patent/JPH0415882B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP27881185A 1985-12-10 1985-12-10 部分クラッド材の幅測定装置 Granted JPS62137504A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27881185A JPS62137504A (ja) 1985-12-10 1985-12-10 部分クラッド材の幅測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27881185A JPS62137504A (ja) 1985-12-10 1985-12-10 部分クラッド材の幅測定装置

Publications (2)

Publication Number Publication Date
JPS62137504A JPS62137504A (ja) 1987-06-20
JPH0415882B2 true JPH0415882B2 (enExample) 1992-03-19

Family

ID=17602492

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27881185A Granted JPS62137504A (ja) 1985-12-10 1985-12-10 部分クラッド材の幅測定装置

Country Status (1)

Country Link
JP (1) JPS62137504A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI114743B (fi) * 1999-09-28 2004-12-15 Ekspansio Engineering Ltd Oy Telesentrisellä periaatteella toimiva laitteisto ja menetelmä

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58190704A (ja) * 1982-04-30 1983-11-07 Nec Kyushu Ltd 線巾の測定方法
JPS58191938A (ja) * 1982-05-06 1983-11-09 Chino Works Ltd 光学的測定装置
JPS5924202A (ja) * 1982-07-30 1984-02-07 Matsushita Electric Works Ltd 表面欠陥検出装置

Also Published As

Publication number Publication date
JPS62137504A (ja) 1987-06-20

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