JPS62137504A - 部分クラッド材の幅測定装置 - Google Patents
部分クラッド材の幅測定装置Info
- Publication number
- JPS62137504A JPS62137504A JP27881185A JP27881185A JPS62137504A JP S62137504 A JPS62137504 A JP S62137504A JP 27881185 A JP27881185 A JP 27881185A JP 27881185 A JP27881185 A JP 27881185A JP S62137504 A JPS62137504 A JP S62137504A
- Authority
- JP
- Japan
- Prior art keywords
- cladding
- width
- signal
- substrate
- image sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 title claims abstract description 60
- 230000007547 defect Effects 0.000 title claims abstract description 29
- 239000000758 substrate Substances 0.000 claims abstract description 46
- 238000005259 measurement Methods 0.000 claims abstract description 14
- 230000004069 differentiation Effects 0.000 claims abstract description 8
- 238000006243 chemical reaction Methods 0.000 claims abstract 2
- 238000005253 cladding Methods 0.000 claims description 97
- 229910052751 metal Inorganic materials 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 13
- 238000003384 imaging method Methods 0.000 claims description 12
- 238000001514 detection method Methods 0.000 claims description 6
- 230000000694 effects Effects 0.000 abstract description 4
- 238000007689 inspection Methods 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 19
- 238000000034 method Methods 0.000 description 5
- 230000000630 rising effect Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 229910003271 Ni-Fe Inorganic materials 0.000 description 1
- 241001655798 Taku Species 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27881185A JPS62137504A (ja) | 1985-12-10 | 1985-12-10 | 部分クラッド材の幅測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27881185A JPS62137504A (ja) | 1985-12-10 | 1985-12-10 | 部分クラッド材の幅測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62137504A true JPS62137504A (ja) | 1987-06-20 |
| JPH0415882B2 JPH0415882B2 (enExample) | 1992-03-19 |
Family
ID=17602492
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27881185A Granted JPS62137504A (ja) | 1985-12-10 | 1985-12-10 | 部分クラッド材の幅測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62137504A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6952231B1 (en) * | 1999-09-28 | 2005-10-04 | Oy Ekspansio Engineering Limited | Apparatus based on a telecentric imaging system for forming an image of a linear zone of an object |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58190704A (ja) * | 1982-04-30 | 1983-11-07 | Nec Kyushu Ltd | 線巾の測定方法 |
| JPS58191938A (ja) * | 1982-05-06 | 1983-11-09 | Chino Works Ltd | 光学的測定装置 |
| JPS5924202A (ja) * | 1982-07-30 | 1984-02-07 | Matsushita Electric Works Ltd | 表面欠陥検出装置 |
-
1985
- 1985-12-10 JP JP27881185A patent/JPS62137504A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58190704A (ja) * | 1982-04-30 | 1983-11-07 | Nec Kyushu Ltd | 線巾の測定方法 |
| JPS58191938A (ja) * | 1982-05-06 | 1983-11-09 | Chino Works Ltd | 光学的測定装置 |
| JPS5924202A (ja) * | 1982-07-30 | 1984-02-07 | Matsushita Electric Works Ltd | 表面欠陥検出装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6952231B1 (en) * | 1999-09-28 | 2005-10-04 | Oy Ekspansio Engineering Limited | Apparatus based on a telecentric imaging system for forming an image of a linear zone of an object |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0415882B2 (enExample) | 1992-03-19 |
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