JPH0414491B2 - - Google Patents

Info

Publication number
JPH0414491B2
JPH0414491B2 JP59102277A JP10227784A JPH0414491B2 JP H0414491 B2 JPH0414491 B2 JP H0414491B2 JP 59102277 A JP59102277 A JP 59102277A JP 10227784 A JP10227784 A JP 10227784A JP H0414491 B2 JPH0414491 B2 JP H0414491B2
Authority
JP
Japan
Prior art keywords
wafer
wafer holder
electron beam
reference member
alignment stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59102277A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60245221A (ja
Inventor
Akira Iwase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP59102277A priority Critical patent/JPS60245221A/ja
Publication of JPS60245221A publication Critical patent/JPS60245221A/ja
Publication of JPH0414491B2 publication Critical patent/JPH0414491B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP59102277A 1984-05-21 1984-05-21 電子ビ−ム描画装置用ウエハホルダ Granted JPS60245221A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59102277A JPS60245221A (ja) 1984-05-21 1984-05-21 電子ビ−ム描画装置用ウエハホルダ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59102277A JPS60245221A (ja) 1984-05-21 1984-05-21 電子ビ−ム描画装置用ウエハホルダ

Publications (2)

Publication Number Publication Date
JPS60245221A JPS60245221A (ja) 1985-12-05
JPH0414491B2 true JPH0414491B2 (enrdf_load_stackoverflow) 1992-03-13

Family

ID=14323103

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59102277A Granted JPS60245221A (ja) 1984-05-21 1984-05-21 電子ビ−ム描画装置用ウエハホルダ

Country Status (1)

Country Link
JP (1) JPS60245221A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5095300A (en) * 1990-03-28 1992-03-10 Nec Electronics Inc. Device for sensing side positioning of wafers

Also Published As

Publication number Publication date
JPS60245221A (ja) 1985-12-05

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