JPH0399431U - - Google Patents
Info
- Publication number
- JPH0399431U JPH0399431U JP765690U JP765690U JPH0399431U JP H0399431 U JPH0399431 U JP H0399431U JP 765690 U JP765690 U JP 765690U JP 765690 U JP765690 U JP 765690U JP H0399431 U JPH0399431 U JP H0399431U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- cover
- spinner head
- showing
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Description
第１図は本考案のスピンコート装置の実施例に
係るカツプ部の構成を示す断面図、第２図は第１
図の実施例におけるウエハーの回転時の変形状態
を示す図、第３図は従来の技術に係るカツプ部の
構成を示す斜視図、第４図は第３図の従来の技術
におけるウエハーの回転時の変形状態を示す図で
ある。 １２…カツプ、１４…回転台、１６…カバー、
１７…ノズル、２２…回転駆動機構、２４…真空
吸着機構、２６…レジスト液送出機構、Ｈｗ…レ
ジスト液、Ｏｐ…ドレン、Ｏｒ…貫通孔、Ｗ…ウ
エハー。
係るカツプ部の構成を示す断面図、第２図は第１
図の実施例におけるウエハーの回転時の変形状態
を示す図、第３図は従来の技術に係るカツプ部の
構成を示す斜視図、第４図は第３図の従来の技術
におけるウエハーの回転時の変形状態を示す図で
ある。 １２…カツプ、１４…回転台、１６…カバー、
１７…ノズル、２２…回転駆動機構、２４…真空
吸着機構、２６…レジスト液送出機構、Ｈｗ…レ
ジスト液、Ｏｐ…ドレン、Ｏｒ…貫通孔、Ｗ…ウ
エハー。
Claims (1)
- 【実用新案登録請求の範囲】 ウエハーが装着されるスピンナーヘツドと、前
記ウエハーを覆うべくスピンナーヘツドに配設さ
れるカバーと を備えるスピンコート装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP765690U JPH0399431U (ja) | 1990-01-30 | 1990-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP765690U JPH0399431U (ja) | 1990-01-30 | 1990-01-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0399431U true JPH0399431U (ja) | 1991-10-17 |
Family
ID=31511311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP765690U Pending JPH0399431U (ja) | 1990-01-30 | 1990-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0399431U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007016439A (ja) * | 2005-07-06 | 2007-01-25 | Aiko Kk | 誘導標識 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS544936A (en) * | 1977-06-14 | 1979-01-16 | Nat Jutaku Kenzai | Rotary coating method of viscous material and apparatus therefor |
| JPS5412670A (en) * | 1977-06-30 | 1979-01-30 | Matsushita Electric Ind Co Ltd | Viscous agnent coating device |
| JPS60143871A (ja) * | 1983-12-28 | 1985-07-30 | Toshiba Corp | レジスト塗布装置 |
| JPH01264223A (ja) * | 1988-04-15 | 1989-10-20 | Hitachi Ltd | レジスト塗布装置 |
-
1990
- 1990-01-30 JP JP765690U patent/JPH0399431U/ja active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS544936A (en) * | 1977-06-14 | 1979-01-16 | Nat Jutaku Kenzai | Rotary coating method of viscous material and apparatus therefor |
| JPS5412670A (en) * | 1977-06-30 | 1979-01-30 | Matsushita Electric Ind Co Ltd | Viscous agnent coating device |
| JPS60143871A (ja) * | 1983-12-28 | 1985-07-30 | Toshiba Corp | レジスト塗布装置 |
| JPH01264223A (ja) * | 1988-04-15 | 1989-10-20 | Hitachi Ltd | レジスト塗布装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007016439A (ja) * | 2005-07-06 | 2007-01-25 | Aiko Kk | 誘導標識 |