JPS631326U - - Google Patents

Info

Publication number
JPS631326U
JPS631326U JP9443686U JP9443686U JPS631326U JP S631326 U JPS631326 U JP S631326U JP 9443686 U JP9443686 U JP 9443686U JP 9443686 U JP9443686 U JP 9443686U JP S631326 U JPS631326 U JP S631326U
Authority
JP
Japan
Prior art keywords
spinner
shaft
brush
resist cover
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9443686U
Other languages
English (en)
Other versions
JPH0238437Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9443686U priority Critical patent/JPH0238437Y2/ja
Publication of JPS631326U publication Critical patent/JPS631326U/ja
Application granted granted Critical
Publication of JPH0238437Y2 publication Critical patent/JPH0238437Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Coating Apparatus (AREA)

Description

【図面の簡単な説明】
第１図はこの考案の実施例であるレジストカバ
ー洗浄装置をスピンナーに装着したときの断面図
、第２図はスピンナー要部の分解斜視図である。 １……受け皿、２……上カバー、３……スピン
モータ、１１……軸着部、１２…ブラシ、１３…
…モータ軸、２１……噴出口、２５……刷毛。

Claims (1)

  1. 【実用新案登録請求の範囲】 ウエハ吸着部周囲にレジストカバーを備え、そ
    の吸着部にウエハを吸着し回転させながらレジス
    トを塗布するスピンナーにおいて、 前記スピンナーの回転軸に着脱自在に軸着され
    る軸着部と、前記軸着部を前記回転軸に軸着した
    とき前記レジストカバー内面に接触する刷毛と洗
    浄液の噴出口を備え、かつ前記軸着部に対し横設
    されたブラシと、前記軸着部内部を経て前記ブラ
    シの噴出口に至る洗浄液経路とを有してなるスピ
    ンナーのレジストカバー洗浄装置。
JP9443686U 1986-06-19 1986-06-19 Expired JPH0238437Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9443686U JPH0238437Y2 (ja) 1986-06-19 1986-06-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9443686U JPH0238437Y2 (ja) 1986-06-19 1986-06-19

Publications (2)

Publication Number Publication Date
JPS631326U true JPS631326U (ja) 1988-01-07
JPH0238437Y2 JPH0238437Y2 (ja) 1990-10-17

Family

ID=30957896

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9443686U Expired JPH0238437Y2 (ja) 1986-06-19 1986-06-19

Country Status (1)

Country Link
JP (1) JPH0238437Y2 (ja)

Also Published As

Publication number Publication date
JPH0238437Y2 (ja) 1990-10-17

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