JPS5412670A - Viscous agnent coating device - Google Patents
Viscous agnent coating deviceInfo
- Publication number
- JPS5412670A JPS5412670A JP7874477A JP7874477A JPS5412670A JP S5412670 A JPS5412670 A JP S5412670A JP 7874477 A JP7874477 A JP 7874477A JP 7874477 A JP7874477 A JP 7874477A JP S5412670 A JPS5412670 A JP S5412670A
- Authority
- JP
- Japan
- Prior art keywords
- coating device
- viscous
- agnent
- samples
- hindrance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To obtain a hermetic rotary-type coating device which can perform a sequential coating of the viscous agent to many test samples with no hindrance of the resist given to attachment/detachment of the cover and which features a perfect vacuum adhesion of the samples.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52078744A JPS584588B2 (en) | 1977-06-30 | 1977-06-30 | Viscous agent applicator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52078744A JPS584588B2 (en) | 1977-06-30 | 1977-06-30 | Viscous agent applicator |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5412670A true JPS5412670A (en) | 1979-01-30 |
JPS584588B2 JPS584588B2 (en) | 1983-01-27 |
Family
ID=13670386
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52078744A Expired JPS584588B2 (en) | 1977-06-30 | 1977-06-30 | Viscous agent applicator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS584588B2 (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5787397A (en) * | 1980-11-19 | 1982-05-31 | Toppan Printing Co Ltd | Transfer printing |
JPS5933453A (en) * | 1982-08-19 | 1984-02-23 | Toshiba Corp | Resist applying device |
JPS60143871A (en) * | 1983-12-28 | 1985-07-30 | Toshiba Corp | Coating device of resist |
US4941426A (en) * | 1987-09-18 | 1990-07-17 | Tokyo Ohka Kogyo Co., Ltd. | Thin-film coating apparatus |
JPH0399431U (en) * | 1990-01-30 | 1991-10-17 | ||
US5209180A (en) * | 1991-03-28 | 1993-05-11 | Dainippon Screen Mfg. Co., Ltd. | Spin coating apparatus with an upper spin plate cleaning nozzle |
US5211753A (en) * | 1992-06-15 | 1993-05-18 | Swain Danny C | Spin coating apparatus with an independently spinning enclosure |
JPH05169003A (en) * | 1991-12-20 | 1993-07-09 | Tokyo Ohka Kogyo Co Ltd | Coating liquid applying device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5139737A (en) * | 1974-10-01 | 1976-04-02 | Canon Kk | HAKUSOTOFUYO SUPINNAA |
-
1977
- 1977-06-30 JP JP52078744A patent/JPS584588B2/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5139737A (en) * | 1974-10-01 | 1976-04-02 | Canon Kk | HAKUSOTOFUYO SUPINNAA |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5787397A (en) * | 1980-11-19 | 1982-05-31 | Toppan Printing Co Ltd | Transfer printing |
JPS5933453A (en) * | 1982-08-19 | 1984-02-23 | Toshiba Corp | Resist applying device |
JPH0250614B2 (en) * | 1982-08-19 | 1990-11-02 | Tokyo Shibaura Electric Co | |
JPS60143871A (en) * | 1983-12-28 | 1985-07-30 | Toshiba Corp | Coating device of resist |
US4941426A (en) * | 1987-09-18 | 1990-07-17 | Tokyo Ohka Kogyo Co., Ltd. | Thin-film coating apparatus |
JPH0399431U (en) * | 1990-01-30 | 1991-10-17 | ||
US5209180A (en) * | 1991-03-28 | 1993-05-11 | Dainippon Screen Mfg. Co., Ltd. | Spin coating apparatus with an upper spin plate cleaning nozzle |
JPH05169003A (en) * | 1991-12-20 | 1993-07-09 | Tokyo Ohka Kogyo Co Ltd | Coating liquid applying device |
US5211753A (en) * | 1992-06-15 | 1993-05-18 | Swain Danny C | Spin coating apparatus with an independently spinning enclosure |
Also Published As
Publication number | Publication date |
---|---|
JPS584588B2 (en) | 1983-01-27 |
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