JPS5412670A - Viscous agnent coating device - Google Patents

Viscous agnent coating device

Info

Publication number
JPS5412670A
JPS5412670A JP7874477A JP7874477A JPS5412670A JP S5412670 A JPS5412670 A JP S5412670A JP 7874477 A JP7874477 A JP 7874477A JP 7874477 A JP7874477 A JP 7874477A JP S5412670 A JPS5412670 A JP S5412670A
Authority
JP
Japan
Prior art keywords
coating device
viscous
agnent
samples
hindrance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7874477A
Other languages
Japanese (ja)
Other versions
JPS584588B2 (en
Inventor
Mitsushi Katano
Tatsuyuki Tomioka
Mitsuo Imamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP52078744A priority Critical patent/JPS584588B2/en
Publication of JPS5412670A publication Critical patent/JPS5412670A/en
Publication of JPS584588B2 publication Critical patent/JPS584588B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a hermetic rotary-type coating device which can perform a sequential coating of the viscous agent to many test samples with no hindrance of the resist given to attachment/detachment of the cover and which features a perfect vacuum adhesion of the samples.
COPYRIGHT: (C)1979,JPO&Japio
JP52078744A 1977-06-30 1977-06-30 Viscous agent applicator Expired JPS584588B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52078744A JPS584588B2 (en) 1977-06-30 1977-06-30 Viscous agent applicator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52078744A JPS584588B2 (en) 1977-06-30 1977-06-30 Viscous agent applicator

Publications (2)

Publication Number Publication Date
JPS5412670A true JPS5412670A (en) 1979-01-30
JPS584588B2 JPS584588B2 (en) 1983-01-27

Family

ID=13670386

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52078744A Expired JPS584588B2 (en) 1977-06-30 1977-06-30 Viscous agent applicator

Country Status (1)

Country Link
JP (1) JPS584588B2 (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5787397A (en) * 1980-11-19 1982-05-31 Toppan Printing Co Ltd Transfer printing
JPS5933453A (en) * 1982-08-19 1984-02-23 Toshiba Corp Resist applying device
JPS60143871A (en) * 1983-12-28 1985-07-30 Toshiba Corp Coating device of resist
US4941426A (en) * 1987-09-18 1990-07-17 Tokyo Ohka Kogyo Co., Ltd. Thin-film coating apparatus
JPH0399431U (en) * 1990-01-30 1991-10-17
US5209180A (en) * 1991-03-28 1993-05-11 Dainippon Screen Mfg. Co., Ltd. Spin coating apparatus with an upper spin plate cleaning nozzle
US5211753A (en) * 1992-06-15 1993-05-18 Swain Danny C Spin coating apparatus with an independently spinning enclosure
JPH05169003A (en) * 1991-12-20 1993-07-09 Tokyo Ohka Kogyo Co Ltd Coating liquid applying device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5139737A (en) * 1974-10-01 1976-04-02 Canon Kk HAKUSOTOFUYO SUPINNAA

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5139737A (en) * 1974-10-01 1976-04-02 Canon Kk HAKUSOTOFUYO SUPINNAA

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5787397A (en) * 1980-11-19 1982-05-31 Toppan Printing Co Ltd Transfer printing
JPS5933453A (en) * 1982-08-19 1984-02-23 Toshiba Corp Resist applying device
JPH0250614B2 (en) * 1982-08-19 1990-11-02 Tokyo Shibaura Electric Co
JPS60143871A (en) * 1983-12-28 1985-07-30 Toshiba Corp Coating device of resist
US4941426A (en) * 1987-09-18 1990-07-17 Tokyo Ohka Kogyo Co., Ltd. Thin-film coating apparatus
JPH0399431U (en) * 1990-01-30 1991-10-17
US5209180A (en) * 1991-03-28 1993-05-11 Dainippon Screen Mfg. Co., Ltd. Spin coating apparatus with an upper spin plate cleaning nozzle
JPH05169003A (en) * 1991-12-20 1993-07-09 Tokyo Ohka Kogyo Co Ltd Coating liquid applying device
US5211753A (en) * 1992-06-15 1993-05-18 Swain Danny C Spin coating apparatus with an independently spinning enclosure

Also Published As

Publication number Publication date
JPS584588B2 (en) 1983-01-27

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