JPS544936A - Rotary coating method of viscous material and apparatus therefor - Google Patents

Rotary coating method of viscous material and apparatus therefor

Info

Publication number
JPS544936A
JPS544936A JP7091477A JP7091477A JPS544936A JP S544936 A JPS544936 A JP S544936A JP 7091477 A JP7091477 A JP 7091477A JP 7091477 A JP7091477 A JP 7091477A JP S544936 A JPS544936 A JP S544936A
Authority
JP
Japan
Prior art keywords
coating method
viscous material
apparatus therefor
rotary coating
rotary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7091477A
Other languages
Japanese (ja)
Other versions
JPS584587B2 (en
Inventor
Tatsuyuki Tomioka
Noboru Yoshigami
Mitsuo Imamura
Riyuukichi Matsumura
Kouji Katano
Kazumi Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National House Industrial Co Ltd
Original Assignee
National House Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National House Industrial Co Ltd filed Critical National House Industrial Co Ltd
Priority to JP52070914A priority Critical patent/JPS584587B2/en
Publication of JPS544936A publication Critical patent/JPS544936A/en
Publication of JPS584587B2 publication Critical patent/JPS584587B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
JP52070914A 1977-06-14 1977-06-14 Rotary viscous agent application method and device Expired JPS584587B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52070914A JPS584587B2 (en) 1977-06-14 1977-06-14 Rotary viscous agent application method and device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52070914A JPS584587B2 (en) 1977-06-14 1977-06-14 Rotary viscous agent application method and device

Publications (2)

Publication Number Publication Date
JPS544936A true JPS544936A (en) 1979-01-16
JPS584587B2 JPS584587B2 (en) 1983-01-27

Family

ID=13445246

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52070914A Expired JPS584587B2 (en) 1977-06-14 1977-06-14 Rotary viscous agent application method and device

Country Status (1)

Country Link
JP (1) JPS584587B2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4861421A (en) * 1971-11-15 1973-08-28
JPS57121227A (en) * 1981-01-20 1982-07-28 Toshiba Corp Resist applying device
JPS60171115A (en) * 1984-02-17 1985-09-04 Toray Ind Inc Preparation of thin film
JPS6223474A (en) * 1985-07-19 1987-01-31 Matsushita Electric Ind Co Ltd Rebounding preventing apparatus of rotary type shake-off apparatus
JPH0399431U (en) * 1990-01-30 1991-10-17
WO2002097492A1 (en) * 2001-05-30 2002-12-05 Hitachi Chemical Co.,Ltd. Optical element, method of producing optical elements, coating device, and coating method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50137079A (en) * 1974-04-17 1975-10-30
JPS5139737A (en) * 1974-10-01 1976-04-02 Canon Kk HAKUSOTOFUYO SUPINNAA

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50137079A (en) * 1974-04-17 1975-10-30
JPS5139737A (en) * 1974-10-01 1976-04-02 Canon Kk HAKUSOTOFUYO SUPINNAA

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4861421A (en) * 1971-11-15 1973-08-28
JPS566992B2 (en) * 1971-11-15 1981-02-14
JPS57121227A (en) * 1981-01-20 1982-07-28 Toshiba Corp Resist applying device
JPS6217851B2 (en) * 1981-01-20 1987-04-20 Tokyo Shibaura Electric Co
JPS60171115A (en) * 1984-02-17 1985-09-04 Toray Ind Inc Preparation of thin film
JPH0416429B2 (en) * 1984-02-17 1992-03-24 Toray Industries
JPS6223474A (en) * 1985-07-19 1987-01-31 Matsushita Electric Ind Co Ltd Rebounding preventing apparatus of rotary type shake-off apparatus
JPH0669544B2 (en) * 1985-07-19 1994-09-07 松下電器産業株式会社 Anti-rebound device for rotary shaker
JPH0399431U (en) * 1990-01-30 1991-10-17
WO2002097492A1 (en) * 2001-05-30 2002-12-05 Hitachi Chemical Co.,Ltd. Optical element, method of producing optical elements, coating device, and coating method
CN100456063C (en) * 2001-05-30 2009-01-28 日立化成工业株式会社 Optical element, method of producing optical elements, coating device, and coating method

Also Published As

Publication number Publication date
JPS584587B2 (en) 1983-01-27

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