JPS544936A - Rotary coating method of viscous material and apparatus therefor - Google Patents
Rotary coating method of viscous material and apparatus thereforInfo
- Publication number
- JPS544936A JPS544936A JP7091477A JP7091477A JPS544936A JP S544936 A JPS544936 A JP S544936A JP 7091477 A JP7091477 A JP 7091477A JP 7091477 A JP7091477 A JP 7091477A JP S544936 A JPS544936 A JP S544936A
- Authority
- JP
- Japan
- Prior art keywords
- coating method
- viscous material
- apparatus therefor
- rotary coating
- rotary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52070914A JPS584587B2 (en) | 1977-06-14 | 1977-06-14 | Rotary viscous agent application method and device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52070914A JPS584587B2 (en) | 1977-06-14 | 1977-06-14 | Rotary viscous agent application method and device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS544936A true JPS544936A (en) | 1979-01-16 |
JPS584587B2 JPS584587B2 (en) | 1983-01-27 |
Family
ID=13445246
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52070914A Expired JPS584587B2 (en) | 1977-06-14 | 1977-06-14 | Rotary viscous agent application method and device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS584587B2 (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4861421A (en) * | 1971-11-15 | 1973-08-28 | ||
JPS57121227A (en) * | 1981-01-20 | 1982-07-28 | Toshiba Corp | Resist applying device |
JPS60171115A (en) * | 1984-02-17 | 1985-09-04 | Toray Ind Inc | Preparation of thin film |
JPS6223474A (en) * | 1985-07-19 | 1987-01-31 | Matsushita Electric Ind Co Ltd | Rebounding preventing apparatus of rotary type shake-off apparatus |
JPH0399431U (en) * | 1990-01-30 | 1991-10-17 | ||
WO2002097492A1 (en) * | 2001-05-30 | 2002-12-05 | Hitachi Chemical Co.,Ltd. | Optical element, method of producing optical elements, coating device, and coating method |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50137079A (en) * | 1974-04-17 | 1975-10-30 | ||
JPS5139737A (en) * | 1974-10-01 | 1976-04-02 | Canon Kk | HAKUSOTOFUYO SUPINNAA |
-
1977
- 1977-06-14 JP JP52070914A patent/JPS584587B2/en not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50137079A (en) * | 1974-04-17 | 1975-10-30 | ||
JPS5139737A (en) * | 1974-10-01 | 1976-04-02 | Canon Kk | HAKUSOTOFUYO SUPINNAA |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4861421A (en) * | 1971-11-15 | 1973-08-28 | ||
JPS566992B2 (en) * | 1971-11-15 | 1981-02-14 | ||
JPS57121227A (en) * | 1981-01-20 | 1982-07-28 | Toshiba Corp | Resist applying device |
JPS6217851B2 (en) * | 1981-01-20 | 1987-04-20 | Tokyo Shibaura Electric Co | |
JPS60171115A (en) * | 1984-02-17 | 1985-09-04 | Toray Ind Inc | Preparation of thin film |
JPH0416429B2 (en) * | 1984-02-17 | 1992-03-24 | Toray Industries | |
JPS6223474A (en) * | 1985-07-19 | 1987-01-31 | Matsushita Electric Ind Co Ltd | Rebounding preventing apparatus of rotary type shake-off apparatus |
JPH0669544B2 (en) * | 1985-07-19 | 1994-09-07 | 松下電器産業株式会社 | Anti-rebound device for rotary shaker |
JPH0399431U (en) * | 1990-01-30 | 1991-10-17 | ||
WO2002097492A1 (en) * | 2001-05-30 | 2002-12-05 | Hitachi Chemical Co.,Ltd. | Optical element, method of producing optical elements, coating device, and coating method |
CN100456063C (en) * | 2001-05-30 | 2009-01-28 | 日立化成工业株式会社 | Optical element, method of producing optical elements, coating device, and coating method |
Also Published As
Publication number | Publication date |
---|---|
JPS584587B2 (en) | 1983-01-27 |
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