JPH0379864B2 - - Google Patents

Info

Publication number
JPH0379864B2
JPH0379864B2 JP57016086A JP1608682A JPH0379864B2 JP H0379864 B2 JPH0379864 B2 JP H0379864B2 JP 57016086 A JP57016086 A JP 57016086A JP 1608682 A JP1608682 A JP 1608682A JP H0379864 B2 JPH0379864 B2 JP H0379864B2
Authority
JP
Japan
Prior art keywords
film
polycrystalline silicon
insulating film
silicon film
contact window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57016086A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58132950A (ja
Inventor
Hideaki Takahashi
Ginjiro Kanbara
Morio Inoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP57016086A priority Critical patent/JPS58132950A/ja
Publication of JPS58132950A publication Critical patent/JPS58132950A/ja
Publication of JPH0379864B2 publication Critical patent/JPH0379864B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W20/069—

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP57016086A 1982-02-03 1982-02-03 半導体装置の製造方法 Granted JPS58132950A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57016086A JPS58132950A (ja) 1982-02-03 1982-02-03 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57016086A JPS58132950A (ja) 1982-02-03 1982-02-03 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS58132950A JPS58132950A (ja) 1983-08-08
JPH0379864B2 true JPH0379864B2 (enExample) 1991-12-20

Family

ID=11906722

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57016086A Granted JPS58132950A (ja) 1982-02-03 1982-02-03 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS58132950A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63204629A (ja) * 1987-02-19 1988-08-24 Sanyo Electric Co Ltd 電極の形成方法
JPS63217630A (ja) * 1987-03-06 1988-09-09 Sony Corp 半導体装置の製造方法
KR920004366B1 (ko) * 1989-09-08 1992-06-04 현대전자산업 주식회사 반도체 장치의 자기 정렬 콘택 제조방법
US5198386A (en) * 1992-06-08 1993-03-30 Micron Technology, Inc. Method of making stacked capacitors for DRAM cell

Also Published As

Publication number Publication date
JPS58132950A (ja) 1983-08-08

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