JPH03786B2 - - Google Patents
Info
- Publication number
- JPH03786B2 JPH03786B2 JP63123264A JP12326488A JPH03786B2 JP H03786 B2 JPH03786 B2 JP H03786B2 JP 63123264 A JP63123264 A JP 63123264A JP 12326488 A JP12326488 A JP 12326488A JP H03786 B2 JPH03786 B2 JP H03786B2
- Authority
- JP
- Japan
- Prior art keywords
- air
- valve
- lower lid
- air supply
- lid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000003860 storage Methods 0.000 claims description 23
- 230000029058 respiratory gaseous exchange Effects 0.000 claims description 10
- 230000003749 cleanliness Effects 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 description 9
- 238000004891 communication Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 241000894006 Bacteria Species 0.000 description 3
- 238000004026 adhesive bonding Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 244000005700 microbiome Species 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000009423 ventilation Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63123264A JPH01292838A (ja) | 1988-05-20 | 1988-05-20 | 清浄度を保った搬送用または保管用箱 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63123264A JPH01292838A (ja) | 1988-05-20 | 1988-05-20 | 清浄度を保った搬送用または保管用箱 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01292838A JPH01292838A (ja) | 1989-11-27 |
| JPH03786B2 true JPH03786B2 (en:Method) | 1991-01-08 |
Family
ID=14856263
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63123264A Granted JPH01292838A (ja) | 1988-05-20 | 1988-05-20 | 清浄度を保った搬送用または保管用箱 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01292838A (en:Method) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3167970B2 (ja) * | 1997-10-13 | 2001-05-21 | ティーディーケイ株式会社 | クリーンボックス、クリーン搬送方法及び装置 |
| JPH11154699A (ja) * | 1997-11-21 | 1999-06-08 | Shin Etsu Polymer Co Ltd | 容器の封止構造 |
| JP4164891B2 (ja) * | 1998-03-03 | 2008-10-15 | 神鋼電機株式会社 | ウェーハ収納容器 |
-
1988
- 1988-05-20 JP JP63123264A patent/JPH01292838A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01292838A (ja) | 1989-11-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5295522A (en) | Gas purge system for isolation enclosure for contamination sensitive items | |
| KR102385686B1 (ko) | 퀵-릴리즈 밸브 모듈, 상기 퀵-릴리즈 밸브 모듈이 제공된 레티클 포드, 및 상기 레티클 포드에 퀵-릴리즈 밸브 모듈을 신속하게 제공하기 위한 방법 | |
| EP0953408A3 (en) | Carrier and polishing apparatus | |
| EP0589812A1 (en) | Sealable container for contamination sensitive items | |
| JP3960787B2 (ja) | 精密基板収納容器 | |
| JP2007533166A (ja) | 流体密封流路を備えた基板容器 | |
| CN105583841B (zh) | 定位治具 | |
| JPH03786B2 (en:Method) | ||
| KR970005452B1 (ko) | 진공 단열재의 코어 재료 수납 용기와 그 코어 재료 충전 장치 및 충전 방법 | |
| US20050132669A1 (en) | Vacuum packaging method and mechanism | |
| WO2007061604A2 (en) | Apparatus and methods for a substrate carrier having an inflatable seal | |
| JPH09174364A (ja) | 半導体ウエハのユニバーサルチャックテーブル | |
| JPH07267410A (ja) | 吸着パッド | |
| JP2005115033A (ja) | フォトマスク収納容器 | |
| US3933194A (en) | Pattern plate device for vacuum sealed molding | |
| JPH0246331B2 (en:Method) | ||
| JP2000164688A5 (ja) | 半導体装置の製造方法 | |
| JPH0551039A (ja) | 包装袋 | |
| JP3873562B2 (ja) | 弁構造体の製造方法 | |
| JPH0534373Y2 (en:Method) | ||
| TWM607955U (zh) | 氣閥及運載容器 | |
| JP3026677U (ja) | 半導体ウエハのユニバーサルチャックテーブル | |
| CN217200771U (zh) | 真空吸附组件和绑定设备 | |
| CN213278038U (zh) | 气阀及运载容器 | |
| JPH0712308Y2 (ja) | バルブ付キャップ |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090108 Year of fee payment: 18 |
|
| EXPY | Cancellation because of completion of term | ||
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090108 Year of fee payment: 18 |