JPH01292838A - 清浄度を保った搬送用または保管用箱 - Google Patents
清浄度を保った搬送用または保管用箱Info
- Publication number
- JPH01292838A JPH01292838A JP63123264A JP12326488A JPH01292838A JP H01292838 A JPH01292838 A JP H01292838A JP 63123264 A JP63123264 A JP 63123264A JP 12326488 A JP12326488 A JP 12326488A JP H01292838 A JPH01292838 A JP H01292838A
- Authority
- JP
- Japan
- Prior art keywords
- air
- rubber tube
- lid
- valve
- locking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000003860 storage Methods 0.000 title claims abstract description 25
- 230000029058 respiratory gaseous exchange Effects 0.000 claims description 9
- 230000003749 cleanliness Effects 0.000 claims description 5
- 238000003466 welding Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 3
- 235000012431 wafers Nutrition 0.000 description 9
- 230000002093 peripheral effect Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 5
- 241000894006 Bacteria Species 0.000 description 3
- 244000005700 microbiome Species 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 230000000241 respiratory effect Effects 0.000 description 2
- 238000009423 ventilation Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63123264A JPH01292838A (ja) | 1988-05-20 | 1988-05-20 | 清浄度を保った搬送用または保管用箱 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63123264A JPH01292838A (ja) | 1988-05-20 | 1988-05-20 | 清浄度を保った搬送用または保管用箱 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01292838A true JPH01292838A (ja) | 1989-11-27 |
| JPH03786B2 JPH03786B2 (en:Method) | 1991-01-08 |
Family
ID=14856263
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63123264A Granted JPH01292838A (ja) | 1988-05-20 | 1988-05-20 | 清浄度を保った搬送用または保管用箱 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01292838A (en:Method) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11121602A (ja) * | 1997-10-13 | 1999-04-30 | Tdk Corp | クリーンボックス、クリーン搬送方法及び装置 |
| JPH11154699A (ja) * | 1997-11-21 | 1999-06-08 | Shin Etsu Polymer Co Ltd | 容器の封止構造 |
| JPH11251422A (ja) * | 1998-03-03 | 1999-09-17 | Shinko Electric Co Ltd | ウェーハ収納容器 |
-
1988
- 1988-05-20 JP JP63123264A patent/JPH01292838A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11121602A (ja) * | 1997-10-13 | 1999-04-30 | Tdk Corp | クリーンボックス、クリーン搬送方法及び装置 |
| JPH11154699A (ja) * | 1997-11-21 | 1999-06-08 | Shin Etsu Polymer Co Ltd | 容器の封止構造 |
| JPH11251422A (ja) * | 1998-03-03 | 1999-09-17 | Shinko Electric Co Ltd | ウェーハ収納容器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03786B2 (en:Method) | 1991-01-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090108 Year of fee payment: 18 |
|
| EXPY | Cancellation because of completion of term | ||
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090108 Year of fee payment: 18 |