JPH0377569B2 - - Google Patents
Info
- Publication number
- JPH0377569B2 JPH0377569B2 JP30285286A JP30285286A JPH0377569B2 JP H0377569 B2 JPH0377569 B2 JP H0377569B2 JP 30285286 A JP30285286 A JP 30285286A JP 30285286 A JP30285286 A JP 30285286A JP H0377569 B2 JPH0377569 B2 JP H0377569B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- main pole
- thin film
- etching
- ferrite
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010408 film Substances 0.000 claims description 35
- 238000005530 etching Methods 0.000 claims description 19
- 239000010409 thin film Substances 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 239000002253 acid Substances 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 3
- 230000002378 acidificating effect Effects 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims description 2
- 229910020641 Co Zr Inorganic materials 0.000 claims 1
- 229910020520 Co—Zr Inorganic materials 0.000 claims 1
- 229910000859 α-Fe Inorganic materials 0.000 description 17
- 239000000919 ceramic Substances 0.000 description 12
- 239000002131 composite material Substances 0.000 description 10
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 239000000696 magnetic material Substances 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 238000004804 winding Methods 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000012790 adhesive layer Substances 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 150000007513 acids Chemical class 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- -1 hydrochloric acid Chemical class 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
Landscapes
- Magnetic Heads (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30285286A JPS63157309A (ja) | 1986-12-20 | 1986-12-20 | 垂直磁気ヘッドの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30285286A JPS63157309A (ja) | 1986-12-20 | 1986-12-20 | 垂直磁気ヘッドの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63157309A JPS63157309A (ja) | 1988-06-30 |
| JPH0377569B2 true JPH0377569B2 (enrdf_load_stackoverflow) | 1991-12-11 |
Family
ID=17913872
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30285286A Granted JPS63157309A (ja) | 1986-12-20 | 1986-12-20 | 垂直磁気ヘッドの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63157309A (enrdf_load_stackoverflow) |
-
1986
- 1986-12-20 JP JP30285286A patent/JPS63157309A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63157309A (ja) | 1988-06-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2979509B2 (ja) | 非磁性のウェーハにキャビティを形成することによって、平坦な磁気ヘッドを製造する方法 | |
| US4636897A (en) | Perpendicular magnetic recording and reproducing thin film head | |
| US4670972A (en) | Method for making magnetic heads | |
| JPH0514322B2 (enrdf_load_stackoverflow) | ||
| JPH0377569B2 (enrdf_load_stackoverflow) | ||
| JP2572213B2 (ja) | 薄膜磁気ヘツド | |
| JPH0453012A (ja) | 薄膜磁気ヘッドの製造方法 | |
| JPH10340426A (ja) | 薄膜磁気ヘッドおよびその製造方法 | |
| JP2707758B2 (ja) | 薄膜磁気ヘッドの製造方法 | |
| JP2596070B2 (ja) | 磁気ヘッドの製造方法 | |
| JP2891817B2 (ja) | 磁気ヘッド製造方法 | |
| JPS6124007A (ja) | 薄膜磁気ヘツド | |
| JP2591075B2 (ja) | 磁気ヘッドの製造方法 | |
| JP2707760B2 (ja) | 薄膜磁気ヘッドの製造方法 | |
| JPS60258715A (ja) | 薄膜磁気ヘツドの製造方法 | |
| JPS6035316A (ja) | 薄膜磁気ヘッド | |
| JP2625526B2 (ja) | 薄膜磁気ヘッド用基板及びその製造方法 | |
| JPS6111914A (ja) | 薄膜磁気ヘツドの製造方法 | |
| JPS62170011A (ja) | 薄膜磁気ヘツドの製造方法 | |
| JP2977897B2 (ja) | 薄膜磁気テープヘッドの製造方法 | |
| JPH07110917A (ja) | 薄膜磁気ヘッド及びその製造方法 | |
| JPH03147507A (ja) | 垂直磁気薄膜ヘッドとその製造方法 | |
| JPS62107418A (ja) | 薄膜磁気ヘツド | |
| JPH02247808A (ja) | 薄膜磁気ヘツド及びその製造方法 | |
| JPH04219609A (ja) | 薄膜磁気ヘッドの製造方法 |