JPH0377442B2 - - Google Patents

Info

Publication number
JPH0377442B2
JPH0377442B2 JP55021393A JP2139380A JPH0377442B2 JP H0377442 B2 JPH0377442 B2 JP H0377442B2 JP 55021393 A JP55021393 A JP 55021393A JP 2139380 A JP2139380 A JP 2139380A JP H0377442 B2 JPH0377442 B2 JP H0377442B2
Authority
JP
Japan
Prior art keywords
scale
metal
light
manufacturing
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP55021393A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56118606A (en
Inventor
Mikio Kenmochi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP2139380A priority Critical patent/JPS56118606A/ja
Priority to DE19813105934 priority patent/DE3105934A1/de
Priority to GB8105226A priority patent/GB2072850B/en
Publication of JPS56118606A publication Critical patent/JPS56118606A/ja
Publication of JPH0377442B2 publication Critical patent/JPH0377442B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B1/00—Measuring instruments characterised by the selection of material therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B3/00—Measuring instruments characterised by the use of mechanical techniques
    • G01B3/02—Rulers with scales or marks for direct reading
    • G01B3/04—Rulers with scales or marks for direct reading rigid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • ing And Chemical Polishing (AREA)
JP2139380A 1980-02-22 1980-02-22 Metal scale and manufacture thereof Granted JPS56118606A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2139380A JPS56118606A (en) 1980-02-22 1980-02-22 Metal scale and manufacture thereof
DE19813105934 DE3105934A1 (de) 1980-02-22 1981-02-18 Metallskala und verfahren zu ihrer herstellung
GB8105226A GB2072850B (en) 1980-02-22 1981-02-19 Metal scale for an electronic measuring instrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2139380A JPS56118606A (en) 1980-02-22 1980-02-22 Metal scale and manufacture thereof

Publications (2)

Publication Number Publication Date
JPS56118606A JPS56118606A (en) 1981-09-17
JPH0377442B2 true JPH0377442B2 (enrdf_load_stackoverflow) 1991-12-10

Family

ID=12053811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2139380A Granted JPS56118606A (en) 1980-02-22 1980-02-22 Metal scale and manufacture thereof

Country Status (3)

Country Link
JP (1) JPS56118606A (enrdf_load_stackoverflow)
DE (1) DE3105934A1 (enrdf_load_stackoverflow)
GB (1) GB2072850B (enrdf_load_stackoverflow)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60118912U (ja) * 1984-01-18 1985-08-12 アルプス電気株式会社 反射型光学式ロ−タリエンコ−ダのコ−ドホイ−ル
JPS61102915U (enrdf_load_stackoverflow) * 1984-12-12 1986-07-01
JPS61197510U (enrdf_load_stackoverflow) * 1985-05-31 1986-12-10
GB2188426A (en) * 1986-03-26 1987-09-30 Digital Building Systems Limit Quantity surveying instrument
JPH04208810A (ja) * 1990-12-03 1992-07-30 Omron Corp 変位信号出力装置
US5963330A (en) * 1996-11-13 1999-10-05 Dr. Johannes Heidenhain Gmbh Optical position measuring device
GB2339910A (en) * 1998-07-17 2000-02-09 Ab Automotive Electronics Ltd Position determining system for a vehicle seat
DE19937023A1 (de) 1999-08-05 2001-02-08 Heidenhain Gmbh Dr Johannes Reflexions-Maßverkörperung und Verfahren zur Herstellung einer Reflexions-Maßverkörperung
JP2006337321A (ja) * 2005-06-06 2006-12-14 Mitsutoyo Corp 光学スケール、及び、その製造方法
WO2013100061A1 (ja) * 2011-12-28 2013-07-04 株式会社ニコン エンコーダ、エンコーダ用スケールの製造方法、エンコーダの製造方法及び駆動装置
JP6425875B2 (ja) * 2013-06-14 2018-11-21 株式会社ミツトヨ 光電式測定器用スケール、エンコーダ及びスケールの形成方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR638014A (fr) * 1926-07-10 1928-05-14 Comp Generale Electricite Procédé pour l'obtention de couches de nickel à partir des tôles composées de couches alternantes de nickel et de cuivre
DE902713C (de) * 1950-02-28 1955-11-17 Wenczler & Heidenhain Verfahren zum Aufbringen von Kopien auf beliebiges Material
DE1217637B (de) * 1961-01-04 1966-05-26 Philips Nv Vorrichtung zum Messen von Verschiebungen
DE1278124B (de) * 1965-09-02 1968-09-19 Leitz Ernst Gmbh Verfahren zur Herstellung von Teilungen, Messmarken, Gittern u. dgl.
CH460365A (de) * 1966-12-08 1968-07-31 Wild Heerbrugg Ag Auf einem optischen Träger aufgebrachte lichtundurchlässige und reflexionsfreie Beschichtung
DE1798372A1 (de) * 1967-03-28 1972-08-10 Rudolph Dietbert Dipl Phys Verfahren zur Herstellung von Reflexions- und Transmissionsgittern
AT284483B (de) * 1967-08-10 1970-09-10 Wenczler & Heidenhain Geätzte Meßteilung und Verfahren zu deren Herstellung
US3878391A (en) * 1973-12-17 1975-04-15 Westinghouse Electric Corp Radiometric pulse initiator having a reflective patterned drum
DE3316144A1 (de) * 1982-05-04 1983-11-10 Canon K.K., Tokyo Verfahren und vorrichtung zum messen des ausmasses einer bewegung

Also Published As

Publication number Publication date
GB2072850A (en) 1981-10-07
DE3105934C2 (enrdf_load_stackoverflow) 1991-07-18
JPS56118606A (en) 1981-09-17
GB2072850B (en) 1984-02-29
DE3105934A1 (de) 1982-01-07

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