DE3105934A1 - Metallskala und verfahren zu ihrer herstellung - Google Patents
Metallskala und verfahren zu ihrer herstellungInfo
- Publication number
- DE3105934A1 DE3105934A1 DE19813105934 DE3105934A DE3105934A1 DE 3105934 A1 DE3105934 A1 DE 3105934A1 DE 19813105934 DE19813105934 DE 19813105934 DE 3105934 A DE3105934 A DE 3105934A DE 3105934 A1 DE3105934 A1 DE 3105934A1
- Authority
- DE
- Germany
- Prior art keywords
- light
- film
- absorbing
- scale
- metal scale
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052751 metal Inorganic materials 0.000 title claims description 32
- 239000002184 metal Substances 0.000 title claims description 32
- 238000000034 method Methods 0.000 title claims description 24
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 239000010408 film Substances 0.000 claims description 39
- 239000000463 material Substances 0.000 claims description 32
- 238000005530 etching Methods 0.000 claims description 21
- 239000004922 lacquer Substances 0.000 claims description 12
- 230000000873 masking effect Effects 0.000 claims description 12
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 6
- 239000011358 absorbing material Substances 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 4
- 239000010935 stainless steel Substances 0.000 claims description 4
- HKVFISRIUUGTIB-UHFFFAOYSA-O azanium;cerium;nitrate Chemical compound [NH4+].[Ce].[O-][N+]([O-])=O HKVFISRIUUGTIB-UHFFFAOYSA-O 0.000 claims description 3
- 238000005498 polishing Methods 0.000 claims description 3
- 208000001848 dysentery Diseases 0.000 claims description 2
- 230000003746 surface roughness Effects 0.000 claims description 2
- VMDFASMUILANOL-WXXKFALUSA-N bisoprolol fumarate Chemical compound [H+].[H+].[O-]C(=O)\C=C\C([O-])=O.CC(C)NCC(O)COC1=CC=C(COCCOC(C)C)C=C1.CC(C)NCC(O)COC1=CC=C(COCCOC(C)C)C=C1 VMDFASMUILANOL-WXXKFALUSA-N 0.000 claims 1
- 150000001875 compounds Chemical class 0.000 claims 1
- 230000008569 process Effects 0.000 description 10
- 238000006243 chemical reaction Methods 0.000 description 5
- 239000011651 chromium Substances 0.000 description 5
- 238000005260 corrosion Methods 0.000 description 5
- 230000007797 corrosion Effects 0.000 description 5
- 238000007747 plating Methods 0.000 description 5
- 238000007788 roughening Methods 0.000 description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 230000003405 preventing effect Effects 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 3
- 230000003628 erosive effect Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000003252 repetitive effect Effects 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000002679 ablation Methods 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000003518 caustics Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 230000003449 preventive effect Effects 0.000 description 1
- 230000002829 reductive effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B1/00—Measuring instruments characterised by the selection of material therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B3/00—Measuring instruments characterised by the use of mechanical techniques
- G01B3/02—Rulers with scales or marks for direct reading
- G01B3/04—Rulers with scales or marks for direct reading rigid
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
- Length Measuring Devices By Optical Means (AREA)
- ing And Chemical Polishing (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2139380A JPS56118606A (en) | 1980-02-22 | 1980-02-22 | Metal scale and manufacture thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3105934A1 true DE3105934A1 (de) | 1982-01-07 |
| DE3105934C2 DE3105934C2 (enrdf_load_stackoverflow) | 1991-07-18 |
Family
ID=12053811
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19813105934 Granted DE3105934A1 (de) | 1980-02-22 | 1981-02-18 | Metallskala und verfahren zu ihrer herstellung |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPS56118606A (enrdf_load_stackoverflow) |
| DE (1) | DE3105934A1 (enrdf_load_stackoverflow) |
| GB (1) | GB2072850B (enrdf_load_stackoverflow) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60118912U (ja) * | 1984-01-18 | 1985-08-12 | アルプス電気株式会社 | 反射型光学式ロ−タリエンコ−ダのコ−ドホイ−ル |
| JPS61102915U (enrdf_load_stackoverflow) * | 1984-12-12 | 1986-07-01 | ||
| JPS61197510U (enrdf_load_stackoverflow) * | 1985-05-31 | 1986-12-10 | ||
| GB2188426A (en) * | 1986-03-26 | 1987-09-30 | Digital Building Systems Limit | Quantity surveying instrument |
| JPH04208810A (ja) * | 1990-12-03 | 1992-07-30 | Omron Corp | 変位信号出力装置 |
| US5963330A (en) * | 1996-11-13 | 1999-10-05 | Dr. Johannes Heidenhain Gmbh | Optical position measuring device |
| GB2339910A (en) * | 1998-07-17 | 2000-02-09 | Ab Automotive Electronics Ltd | Position determining system for a vehicle seat |
| DE19937023A1 (de) | 1999-08-05 | 2001-02-08 | Heidenhain Gmbh Dr Johannes | Reflexions-Maßverkörperung und Verfahren zur Herstellung einer Reflexions-Maßverkörperung |
| JP2006337321A (ja) * | 2005-06-06 | 2006-12-14 | Mitsutoyo Corp | 光学スケール、及び、その製造方法 |
| WO2013100061A1 (ja) * | 2011-12-28 | 2013-07-04 | 株式会社ニコン | エンコーダ、エンコーダ用スケールの製造方法、エンコーダの製造方法及び駆動装置 |
| JP6425875B2 (ja) * | 2013-06-14 | 2018-11-21 | 株式会社ミツトヨ | 光電式測定器用スケール、エンコーダ及びスケールの形成方法 |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR638014A (fr) * | 1926-07-10 | 1928-05-14 | Comp Generale Electricite | Procédé pour l'obtention de couches de nickel à partir des tôles composées de couches alternantes de nickel et de cuivre |
| DE902713C (de) * | 1950-02-28 | 1955-11-17 | Wenczler & Heidenhain | Verfahren zum Aufbringen von Kopien auf beliebiges Material |
| DE1217637B (de) * | 1961-01-04 | 1966-05-26 | Philips Nv | Vorrichtung zum Messen von Verschiebungen |
| CH460365A (de) * | 1966-12-08 | 1968-07-31 | Wild Heerbrugg Ag | Auf einem optischen Träger aufgebrachte lichtundurchlässige und reflexionsfreie Beschichtung |
| DE1278124B (de) * | 1965-09-02 | 1968-09-19 | Leitz Ernst Gmbh | Verfahren zur Herstellung von Teilungen, Messmarken, Gittern u. dgl. |
| US3573007A (en) * | 1967-08-10 | 1971-03-30 | Wenczler & Heidenhain | Measuring scale division |
| DE1798372A1 (de) * | 1967-03-28 | 1972-08-10 | Rudolph Dietbert Dipl Phys | Verfahren zur Herstellung von Reflexions- und Transmissionsgittern |
| DE3316144A1 (de) * | 1982-05-04 | 1983-11-10 | Canon K.K., Tokyo | Verfahren und vorrichtung zum messen des ausmasses einer bewegung |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3878391A (en) * | 1973-12-17 | 1975-04-15 | Westinghouse Electric Corp | Radiometric pulse initiator having a reflective patterned drum |
-
1980
- 1980-02-22 JP JP2139380A patent/JPS56118606A/ja active Granted
-
1981
- 1981-02-18 DE DE19813105934 patent/DE3105934A1/de active Granted
- 1981-02-19 GB GB8105226A patent/GB2072850B/en not_active Expired
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR638014A (fr) * | 1926-07-10 | 1928-05-14 | Comp Generale Electricite | Procédé pour l'obtention de couches de nickel à partir des tôles composées de couches alternantes de nickel et de cuivre |
| DE902713C (de) * | 1950-02-28 | 1955-11-17 | Wenczler & Heidenhain | Verfahren zum Aufbringen von Kopien auf beliebiges Material |
| DE1217637B (de) * | 1961-01-04 | 1966-05-26 | Philips Nv | Vorrichtung zum Messen von Verschiebungen |
| DE1278124B (de) * | 1965-09-02 | 1968-09-19 | Leitz Ernst Gmbh | Verfahren zur Herstellung von Teilungen, Messmarken, Gittern u. dgl. |
| CH460365A (de) * | 1966-12-08 | 1968-07-31 | Wild Heerbrugg Ag | Auf einem optischen Träger aufgebrachte lichtundurchlässige und reflexionsfreie Beschichtung |
| DE1798372A1 (de) * | 1967-03-28 | 1972-08-10 | Rudolph Dietbert Dipl Phys | Verfahren zur Herstellung von Reflexions- und Transmissionsgittern |
| US3573007A (en) * | 1967-08-10 | 1971-03-30 | Wenczler & Heidenhain | Measuring scale division |
| DE3316144A1 (de) * | 1982-05-04 | 1983-11-10 | Canon K.K., Tokyo | Verfahren und vorrichtung zum messen des ausmasses einer bewegung |
Non-Patent Citations (3)
| Title |
|---|
| EISLER, Paul: The Technology of Printed Circuits, London, Heywood & Company Ltd. 1959, S. 96-105 * |
| J.Sci. Instrum., Vol. 39, 1962, S. 405-413 * |
| The Instrument Maker, 1948, H. Juli-August, S. 4,6,8,10,12 * |
Also Published As
| Publication number | Publication date |
|---|---|
| GB2072850A (en) | 1981-10-07 |
| JPH0377442B2 (enrdf_load_stackoverflow) | 1991-12-10 |
| DE3105934C2 (enrdf_load_stackoverflow) | 1991-07-18 |
| JPS56118606A (en) | 1981-09-17 |
| GB2072850B (en) | 1984-02-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE3751134T2 (de) | Simultanes Ätzen von Mehrschicht- und Bildstrukturen. | |
| DE19525745B4 (de) | Verfahren zur Bildung eines Abdeckungsmusters | |
| DE1597803A1 (de) | Photomaske zum Belichten ausgewaehlter Teile einer lichtempfindlichen Schicht | |
| EP0742455B1 (de) | Ma stab und Verfahren zur Herstellung eines Ma stabes sowie Positionsmesseinrichtung | |
| EP0629592B1 (de) | Verfahren zur Herstellung anorganischer diffraktiver Elemente und Verwendung derselben | |
| DE3105934A1 (de) | Metallskala und verfahren zu ihrer herstellung | |
| DE3783239T2 (de) | Roentgenstrahlmaske. | |
| DE1622333A1 (de) | Herstellungsverfahren fuer eine Maske zum Herstellen einer Maskierung | |
| DE3428565A1 (de) | Antireflexionsueberzug fuer optische lithographie | |
| EP0104685B1 (de) | Verfahren zur Herstellung einer Maske für die Musterzeugung in Lackschichten mittels Röntgenstrahllithographie | |
| DE3727678C2 (enrdf_load_stackoverflow) | ||
| DE19958201A1 (de) | Lithographieverfahren und Maske zu dessen Durchführung | |
| EP1436647A2 (de) | Verfahren zur herstellung eines massstabes, sowie derart hergestellter massstab und eine positionsmesseinrichtung | |
| DE10349087B4 (de) | Verfahren zur Herstellung von Halbton-Phasenverschiebungsmasken-Rohlingen | |
| DE69328140T2 (de) | Blankophotomaske und Phasenverschiebungsmaske | |
| DE60105904T2 (de) | Rohling für Phasenschiebermaske, Phasenschiebermaske und Verfahren zu deren Herstellung | |
| DE2123887C3 (enrdf_load_stackoverflow) | ||
| DE3435750A1 (de) | Verfahren zum erzielen einer konstanten masshaltigkeit von leiterbahnen in integrierten schaltkreisen | |
| DE2018725A1 (de) | Verfahren und Vorrichtung zur Herstel-IHBf Hugn§sMtirc-r§rr8o"!; Culver City, Calif. (V.St.A.) | |
| DE19503393A1 (de) | Halbton-Phasenschiebermaske und Verfahren zur Herstellung derselben | |
| DE3133350A1 (de) | "verfahren zur herstellung von maskierungsschichten auf einer zu strukturierenden flaeche eines festkoerpers" | |
| EP1509815A1 (de) | Photosensitiver lack zur beschichtung auf einem halbleiter-substrat oder einer maske | |
| DE19609297B4 (de) | Projektionsbelichtungsverfahren und hierfür verwendbare Maske | |
| DE2528666A1 (de) | Verfahren zur herstellung einer maske fuer roentgenstrahl-lithographie | |
| DE10032282B4 (de) | Lithografisches Belichtungs- und Strukturierungsverfahren unter Verwendung einer Antireflexionsschicht |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| 8125 | Change of the main classification |
Ipc: G01D 13/02 |
|
| D2 | Grant after examination | ||
| 8363 | Opposition against the patent | ||
| 8366 | Restricted maintained after opposition proceedings | ||
| 8305 | Restricted maintenance of patent after opposition | ||
| D4 | Patent maintained restricted | ||
| 8339 | Ceased/non-payment of the annual fee |