JPS56118606A - Metal scale and manufacture thereof - Google Patents

Metal scale and manufacture thereof

Info

Publication number
JPS56118606A
JPS56118606A JP2139380A JP2139380A JPS56118606A JP S56118606 A JPS56118606 A JP S56118606A JP 2139380 A JP2139380 A JP 2139380A JP 2139380 A JP2139380 A JP 2139380A JP S56118606 A JPS56118606 A JP S56118606A
Authority
JP
Japan
Prior art keywords
film
reflection preventing
metal scale
scale
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2139380A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0377442B2 (enrdf_load_stackoverflow
Inventor
Mikio Kenmochi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsutoyo Manufacturing Co Ltd
Original Assignee
Mitsutoyo Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsutoyo Manufacturing Co Ltd filed Critical Mitsutoyo Manufacturing Co Ltd
Priority to JP2139380A priority Critical patent/JPS56118606A/ja
Priority to DE19813105934 priority patent/DE3105934A1/de
Priority to GB8105226A priority patent/GB2072850B/en
Publication of JPS56118606A publication Critical patent/JPS56118606A/ja
Publication of JPH0377442B2 publication Critical patent/JPH0377442B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B1/00Measuring instruments characterised by the selection of material therefor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B3/00Measuring instruments characterised by the use of mechanical techniques
    • G01B3/02Rulers with scales or marks for direct reading
    • G01B3/04Rulers with scales or marks for direct reading rigid
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • ing And Chemical Polishing (AREA)
JP2139380A 1980-02-22 1980-02-22 Metal scale and manufacture thereof Granted JPS56118606A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2139380A JPS56118606A (en) 1980-02-22 1980-02-22 Metal scale and manufacture thereof
DE19813105934 DE3105934A1 (de) 1980-02-22 1981-02-18 Metallskala und verfahren zu ihrer herstellung
GB8105226A GB2072850B (en) 1980-02-22 1981-02-19 Metal scale for an electronic measuring instrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2139380A JPS56118606A (en) 1980-02-22 1980-02-22 Metal scale and manufacture thereof

Publications (2)

Publication Number Publication Date
JPS56118606A true JPS56118606A (en) 1981-09-17
JPH0377442B2 JPH0377442B2 (enrdf_load_stackoverflow) 1991-12-10

Family

ID=12053811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2139380A Granted JPS56118606A (en) 1980-02-22 1980-02-22 Metal scale and manufacture thereof

Country Status (3)

Country Link
JP (1) JPS56118606A (enrdf_load_stackoverflow)
DE (1) DE3105934A1 (enrdf_load_stackoverflow)
GB (1) GB2072850B (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60118912U (ja) * 1984-01-18 1985-08-12 アルプス電気株式会社 反射型光学式ロ−タリエンコ−ダのコ−ドホイ−ル
JPS61102915U (enrdf_load_stackoverflow) * 1984-12-12 1986-07-01
JPS61197510U (enrdf_load_stackoverflow) * 1985-05-31 1986-12-10
JP2006337321A (ja) * 2005-06-06 2006-12-14 Mitsutoyo Corp 光学スケール、及び、その製造方法
JP2015001412A (ja) * 2013-06-14 2015-01-05 株式会社ミツトヨ 光電式測定器用スケール、エンコーダ及びスケールの形成方法
JP2016183983A (ja) * 2011-12-28 2016-10-20 株式会社ニコン エンコーダ用スケールの製造方法及びエンコーダの製造方法

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2188426A (en) * 1986-03-26 1987-09-30 Digital Building Systems Limit Quantity surveying instrument
JPH04208810A (ja) * 1990-12-03 1992-07-30 Omron Corp 変位信号出力装置
US5963330A (en) * 1996-11-13 1999-10-05 Dr. Johannes Heidenhain Gmbh Optical position measuring device
GB2339910A (en) * 1998-07-17 2000-02-09 Ab Automotive Electronics Ltd Position determining system for a vehicle seat
DE19937023A1 (de) 1999-08-05 2001-02-08 Heidenhain Gmbh Dr Johannes Reflexions-Maßverkörperung und Verfahren zur Herstellung einer Reflexions-Maßverkörperung

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5098751U (enrdf_load_stackoverflow) * 1973-12-17 1975-08-16

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR638014A (fr) * 1926-07-10 1928-05-14 Comp Generale Electricite Procédé pour l'obtention de couches de nickel à partir des tôles composées de couches alternantes de nickel et de cuivre
DE902713C (de) * 1950-02-28 1955-11-17 Wenczler & Heidenhain Verfahren zum Aufbringen von Kopien auf beliebiges Material
DE1217637B (de) * 1961-01-04 1966-05-26 Philips Nv Vorrichtung zum Messen von Verschiebungen
DE1278124B (de) * 1965-09-02 1968-09-19 Leitz Ernst Gmbh Verfahren zur Herstellung von Teilungen, Messmarken, Gittern u. dgl.
CH460365A (de) * 1966-12-08 1968-07-31 Wild Heerbrugg Ag Auf einem optischen Träger aufgebrachte lichtundurchlässige und reflexionsfreie Beschichtung
DE1798372A1 (de) * 1967-03-28 1972-08-10 Rudolph Dietbert Dipl Phys Verfahren zur Herstellung von Reflexions- und Transmissionsgittern
AT284483B (de) * 1967-08-10 1970-09-10 Wenczler & Heidenhain Geätzte Meßteilung und Verfahren zu deren Herstellung
DE3316144A1 (de) * 1982-05-04 1983-11-10 Canon K.K., Tokyo Verfahren und vorrichtung zum messen des ausmasses einer bewegung

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5098751U (enrdf_load_stackoverflow) * 1973-12-17 1975-08-16

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60118912U (ja) * 1984-01-18 1985-08-12 アルプス電気株式会社 反射型光学式ロ−タリエンコ−ダのコ−ドホイ−ル
JPS61102915U (enrdf_load_stackoverflow) * 1984-12-12 1986-07-01
JPS61197510U (enrdf_load_stackoverflow) * 1985-05-31 1986-12-10
JP2006337321A (ja) * 2005-06-06 2006-12-14 Mitsutoyo Corp 光学スケール、及び、その製造方法
JP2016183983A (ja) * 2011-12-28 2016-10-20 株式会社ニコン エンコーダ用スケールの製造方法及びエンコーダの製造方法
JP2015001412A (ja) * 2013-06-14 2015-01-05 株式会社ミツトヨ 光電式測定器用スケール、エンコーダ及びスケールの形成方法

Also Published As

Publication number Publication date
GB2072850A (en) 1981-10-07
JPH0377442B2 (enrdf_load_stackoverflow) 1991-12-10
DE3105934C2 (enrdf_load_stackoverflow) 1991-07-18
GB2072850B (en) 1984-02-29
DE3105934A1 (de) 1982-01-07

Similar Documents

Publication Publication Date Title
JPS5299810A (en) Photosensitive resinous composition and metal image forming material u sing the same
JPS57211732A (en) X ray exposing mask and manufacture thereof
JPS5593225A (en) Forming method of minute pattern
JPS56118606A (en) Metal scale and manufacture thereof
JPS5225651A (en) Process for fabricating an optical curved surface using a photopolymer izable adhesive
JPS5517152A (en) Photo mask
JPS52139375A (en) Mask for x-ray exposure
JPS57106128A (en) Forming method for pattern
JPS5320770A (en) Production of thin film fine patterns
JPS5680133A (en) Formation of pattern
JPS5347825A (en) Photoresist exposure
JPS5339060A (en) Lot number marking method to wafers
JPS5437579A (en) Chrome plate
JPS5742043A (en) Photosensitive material
JPS5399772A (en) Optical mask
JPS5421273A (en) Manufacture for photo mask
JPS55113046A (en) Pattern forming method
JPS53135844A (en) Photochemical etching procee
JPS5360177A (en) Photo mask
JPS5380994A (en) Lift-off method
JPS5421272A (en) Metal photo mask
JPS5596952A (en) Production of photomask
JPS5322369A (en) Flaw mending method of photo mask materials
JPS5255381A (en) Photo exposure method
JPS5511301A (en) Method of forming fine pattern