JPH0374828B2 - - Google Patents

Info

Publication number
JPH0374828B2
JPH0374828B2 JP59141402A JP14140284A JPH0374828B2 JP H0374828 B2 JPH0374828 B2 JP H0374828B2 JP 59141402 A JP59141402 A JP 59141402A JP 14140284 A JP14140284 A JP 14140284A JP H0374828 B2 JPH0374828 B2 JP H0374828B2
Authority
JP
Japan
Prior art keywords
stripping
methylene chloride
photoresist
present
alcohol
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59141402A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6120946A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14140284A priority Critical patent/JPS6120946A/ja
Publication of JPS6120946A publication Critical patent/JPS6120946A/ja
Publication of JPH0374828B2 publication Critical patent/JPH0374828B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor
    • G03F7/422—Stripping or agents therefor using liquids only
    • G03F7/426—Stripping or agents therefor using liquids only containing organic halogen compounds; containing organic sulfonic acids or salts thereof; containing sulfoxides

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Detergent Compositions (AREA)
JP14140284A 1984-07-10 1984-07-10 フォトレジスト剥離用組成物 Granted JPS6120946A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14140284A JPS6120946A (ja) 1984-07-10 1984-07-10 フォトレジスト剥離用組成物

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14140284A JPS6120946A (ja) 1984-07-10 1984-07-10 フォトレジスト剥離用組成物

Publications (2)

Publication Number Publication Date
JPS6120946A JPS6120946A (ja) 1986-01-29
JPH0374828B2 true JPH0374828B2 (cs) 1991-11-28

Family

ID=15291166

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14140284A Granted JPS6120946A (ja) 1984-07-10 1984-07-10 フォトレジスト剥離用組成物

Country Status (1)

Country Link
JP (1) JPS6120946A (cs)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2601703B1 (fr) * 1986-07-21 1993-05-07 Atochem Composition a base de chlorure de methylene - son utilisation pour l'enlevement des films photoresist
JP2591644B2 (ja) * 1987-03-11 1997-03-19 東京応化工業株式会社 ホトレジストの剥離液
JP3095296B2 (ja) * 1991-12-19 2000-10-03 株式会社日立製作所 レジスト剥離方法、これを用いた薄膜回路素子の製造方法、および、レジスト剥離液

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT979170B (it) * 1972-04-07 1974-09-30 Solvay Procedimento di stabilizzazione del cloruro di metilene
NL159079C (cs) * 1973-02-23
JPS5228768B2 (cs) * 1973-05-16 1977-07-28
JPS5228767B2 (cs) * 1973-05-16 1977-07-28
JPS5228769B2 (cs) * 1973-05-16 1977-07-28
JPS5217002A (en) * 1975-07-30 1977-02-08 Toshiba Corp Manufaceuring method of pick-up cantilever
JPS5813974B2 (ja) * 1975-07-30 1983-03-16 日立マクセル株式会社 ジキキロクテ−プ
JPS5245241A (en) * 1975-10-08 1977-04-09 Hitachi Metals Ltd Wide-band concentrated constant type circulator
JPS5545636A (en) * 1978-09-28 1980-03-31 Toagosei Chem Ind Co Ltd Stabilization of methylene chloride
EP0011658B1 (en) * 1978-12-01 1982-05-19 Dow Chemical (Europe) S.A. Stabilized methylene chloride formulation for vapor degreasing
JPS5637212A (en) * 1979-08-29 1981-04-10 Kyoritsu Yuki Kogyo Kenkyusho:Kk Activated carbon dehydrating method
JPS56113715A (en) * 1980-02-12 1981-09-07 Shin Etsu Chem Co Ltd Methylene chloride composition
JPS6023089B2 (ja) * 1980-08-05 1985-06-05 株式会社トクヤマ 塩化メチレンの安定化方法
JPS59487A (ja) * 1982-06-23 1984-01-05 東洋エクステリア株式会社 伸縮形門扉

Also Published As

Publication number Publication date
JPS6120946A (ja) 1986-01-29

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