JPH0372154B2 - - Google Patents

Info

Publication number
JPH0372154B2
JPH0372154B2 JP1689086A JP1689086A JPH0372154B2 JP H0372154 B2 JPH0372154 B2 JP H0372154B2 JP 1689086 A JP1689086 A JP 1689086A JP 1689086 A JP1689086 A JP 1689086A JP H0372154 B2 JPH0372154 B2 JP H0372154B2
Authority
JP
Japan
Prior art keywords
sample
ion
ion source
vapor
deposited metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1689086A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62177177A (ja
Inventor
Katsuhiko Yui
Kazuhiko Fukutani
Kenji Sugyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP1689086A priority Critical patent/JPS62177177A/ja
Publication of JPS62177177A publication Critical patent/JPS62177177A/ja
Publication of JPH0372154B2 publication Critical patent/JPH0372154B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1689086A 1986-01-30 1986-01-30 イオンミキシング装置 Granted JPS62177177A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1689086A JPS62177177A (ja) 1986-01-30 1986-01-30 イオンミキシング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1689086A JPS62177177A (ja) 1986-01-30 1986-01-30 イオンミキシング装置

Publications (2)

Publication Number Publication Date
JPS62177177A JPS62177177A (ja) 1987-08-04
JPH0372154B2 true JPH0372154B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-11-15

Family

ID=11928757

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1689086A Granted JPS62177177A (ja) 1986-01-30 1986-01-30 イオンミキシング装置

Country Status (1)

Country Link
JP (1) JPS62177177A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2429777B2 (en) * 2009-05-15 2022-06-01 The Gillette Company LLC Razor blade coating

Also Published As

Publication number Publication date
JPS62177177A (ja) 1987-08-04

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