JPH0368886B2 - - Google Patents

Info

Publication number
JPH0368886B2
JPH0368886B2 JP59143899A JP14389984A JPH0368886B2 JP H0368886 B2 JPH0368886 B2 JP H0368886B2 JP 59143899 A JP59143899 A JP 59143899A JP 14389984 A JP14389984 A JP 14389984A JP H0368886 B2 JPH0368886 B2 JP H0368886B2
Authority
JP
Japan
Prior art keywords
thin film
electrode
plasma
substrate
raw
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59143899A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6121106A (ja
Inventor
Koichi Iwata
Hideo Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP14389984A priority Critical patent/JPS6121106A/ja
Publication of JPS6121106A publication Critical patent/JPS6121106A/ja
Publication of JPH0368886B2 publication Critical patent/JPH0368886B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compositions Of Macromolecular Compounds (AREA)
  • Polymerisation Methods In General (AREA)
  • Other Resins Obtained By Reactions Not Involving Carbon-To-Carbon Unsaturated Bonds (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
JP14389984A 1984-07-10 1984-07-10 有機薄膜形成方法及び装置 Granted JPS6121106A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14389984A JPS6121106A (ja) 1984-07-10 1984-07-10 有機薄膜形成方法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14389984A JPS6121106A (ja) 1984-07-10 1984-07-10 有機薄膜形成方法及び装置

Publications (2)

Publication Number Publication Date
JPS6121106A JPS6121106A (ja) 1986-01-29
JPH0368886B2 true JPH0368886B2 (enExample) 1991-10-30

Family

ID=15349646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14389984A Granted JPS6121106A (ja) 1984-07-10 1984-07-10 有機薄膜形成方法及び装置

Country Status (1)

Country Link
JP (1) JPS6121106A (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59164304A (ja) * 1983-03-07 1984-09-17 Mitsubishi Electric Corp 高分子重合膜形成装置

Also Published As

Publication number Publication date
JPS6121106A (ja) 1986-01-29

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