JPS6121106A - 有機薄膜形成方法及び装置 - Google Patents
有機薄膜形成方法及び装置Info
- Publication number
- JPS6121106A JPS6121106A JP14389984A JP14389984A JPS6121106A JP S6121106 A JPS6121106 A JP S6121106A JP 14389984 A JP14389984 A JP 14389984A JP 14389984 A JP14389984 A JP 14389984A JP S6121106 A JPS6121106 A JP S6121106A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- raw material
- substrate
- plasma
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Compositions Of Macromolecular Compounds (AREA)
- Polymerisation Methods In General (AREA)
- Other Resins Obtained By Reactions Not Involving Carbon-To-Carbon Unsaturated Bonds (AREA)
- Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14389984A JPS6121106A (ja) | 1984-07-10 | 1984-07-10 | 有機薄膜形成方法及び装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14389984A JPS6121106A (ja) | 1984-07-10 | 1984-07-10 | 有機薄膜形成方法及び装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6121106A true JPS6121106A (ja) | 1986-01-29 |
| JPH0368886B2 JPH0368886B2 (enExample) | 1991-10-30 |
Family
ID=15349646
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14389984A Granted JPS6121106A (ja) | 1984-07-10 | 1984-07-10 | 有機薄膜形成方法及び装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6121106A (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59164304A (ja) * | 1983-03-07 | 1984-09-17 | Mitsubishi Electric Corp | 高分子重合膜形成装置 |
-
1984
- 1984-07-10 JP JP14389984A patent/JPS6121106A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59164304A (ja) * | 1983-03-07 | 1984-09-17 | Mitsubishi Electric Corp | 高分子重合膜形成装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0368886B2 (enExample) | 1991-10-30 |
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