JPH0367424U - - Google Patents

Info

Publication number
JPH0367424U
JPH0367424U JP12812189U JP12812189U JPH0367424U JP H0367424 U JPH0367424 U JP H0367424U JP 12812189 U JP12812189 U JP 12812189U JP 12812189 U JP12812189 U JP 12812189U JP H0367424 U JPH0367424 U JP H0367424U
Authority
JP
Japan
Prior art keywords
core tube
heat treatment
furnace core
entrance
furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12812189U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12812189U priority Critical patent/JPH0367424U/ja
Publication of JPH0367424U publication Critical patent/JPH0367424U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図及び第２図は本考案にかかる熱処理装置
の異なる状態を示す縦断面図である。第３図は従
来の熱処理装置の縦断面図、第４図及び第５図は
従来の別の熱処理装置の異なる状態を示す縦断面
図である。 ２……ヒータ、６……半導体ウエーハ、１７…
…操作棒、３０……炉芯管、３０ａ……ガス供給
口、３０ｂ……出入口、３１……ウエーハ処理部
、３２……操作棒待機部、３８……遮蔽板。

Claims (1)

  1. 【実用新案登録請求の範囲】 ヒータにて加熱され、かつ、ガス供給口より熱
    処理ガスを導入する炉芯管と、複数の半導体ウエ
    ーハを所定間隔で整列保持するボートと、ボート
    を支承して炉芯管の出入口より炉芯管内に非接触
    で搬入、搬出する操作棒と、前記操作棒を着脱自
    在に遊挿し、炉芯管の出入口をギヤツプをあけて
    閉鎖する遮蔽板とを具備した熱処理装置において
    、 上記炉芯管をヒータの２倍以上の長さとし、炉
    芯管内を、ガス供給口側のウエーハ熱処理部と、
    出入口側の操作棒待機部とで構成したことを特徴
    とする熱処理装置。
JP12812189U 1989-10-31 1989-10-31 Pending JPH0367424U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12812189U JPH0367424U (ja) 1989-10-31 1989-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12812189U JPH0367424U (ja) 1989-10-31 1989-10-31

Publications (1)

Publication Number Publication Date
JPH0367424U true JPH0367424U (ja) 1991-07-01

Family

ID=31675847

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12812189U Pending JPH0367424U (ja) 1989-10-31 1989-10-31

Country Status (1)

Country Link
JP (1) JPH0367424U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009229719A (ja) * 2008-03-21 2009-10-08 Masaaki Asano 旗竿の起立補助具

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009229719A (ja) * 2008-03-21 2009-10-08 Masaaki Asano 旗竿の起立補助具
JP4649488B2 (ja) * 2008-03-21 2011-03-09 政明 浅野 旗竿の起立補助具

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