JPH044738U - - Google Patents

Info

Publication number
JPH044738U
JPH044738U JP4394090U JP4394090U JPH044738U JP H044738 U JPH044738 U JP H044738U JP 4394090 U JP4394090 U JP 4394090U JP 4394090 U JP4394090 U JP 4394090U JP H044738 U JPH044738 U JP H044738U
Authority
JP
Japan
Prior art keywords
heat treatment
core tube
branch pipe
furnace core
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4394090U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4394090U priority Critical patent/JPH044738U/ja
Publication of JPH044738U publication Critical patent/JPH044738U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案に係る熱処理装置の正断面図、
第２図は同じく左側面図である。第３図乃至第５
図は従来のそれぞれ異なる熱処理装置の正断面図
である。 ３……炉芯管、６……ボート、７……半導体ウ
エーハ、１１……熱処理ガス、１６……枝管、１
６ａ……連設する部位。

Claims (1)

  1. 【実用新案登録請求の範囲】 ボートに整列保持された多数枚の半導体ウエー
    ハを収納する炉芯管の一端に、熱処理ガスを炉芯
    管内に導入する枝管を連設した熱処理装置におい
    て、 炉芯管と連設する部位の枝管を分枝して、螺旋
    状に形成したことを特徴とする熱処理装置。
JP4394090U 1990-04-23 1990-04-23 Pending JPH044738U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4394090U JPH044738U (ja) 1990-04-23 1990-04-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4394090U JPH044738U (ja) 1990-04-23 1990-04-23

Publications (1)

Publication Number Publication Date
JPH044738U true JPH044738U (ja) 1992-01-16

Family

ID=31556789

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4394090U Pending JPH044738U (ja) 1990-04-23 1990-04-23

Country Status (1)

Country Link
JP (1) JPH044738U (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06304195A (ja) * 1993-04-26 1994-11-01 Iwao Kasahara 外反母指矯正用サポータ
JPH06304194A (ja) * 1993-04-26 1994-11-01 Iwao Kasahara 外反母指矯正用サポータ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06304195A (ja) * 1993-04-26 1994-11-01 Iwao Kasahara 外反母指矯正用サポータ
JPH06304194A (ja) * 1993-04-26 1994-11-01 Iwao Kasahara 外反母指矯正用サポータ

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