JPH0361346B2 - - Google Patents

Info

Publication number
JPH0361346B2
JPH0361346B2 JP56184800A JP18480081A JPH0361346B2 JP H0361346 B2 JPH0361346 B2 JP H0361346B2 JP 56184800 A JP56184800 A JP 56184800A JP 18480081 A JP18480081 A JP 18480081A JP H0361346 B2 JPH0361346 B2 JP H0361346B2
Authority
JP
Japan
Prior art keywords
wti
wiring
film
alloy
gold
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56184800A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5886724A (ja
Inventor
Masaoki Ishikawa
Hideaki Kozu
Kohei Higuchi
Hidekazu Okabayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP56184800A priority Critical patent/JPS5886724A/ja
Publication of JPS5886724A publication Critical patent/JPS5886724A/ja
Publication of JPH0361346B2 publication Critical patent/JPH0361346B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10D64/011—

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP56184800A 1981-11-18 1981-11-18 電極および配線の製造方法 Granted JPS5886724A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56184800A JPS5886724A (ja) 1981-11-18 1981-11-18 電極および配線の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56184800A JPS5886724A (ja) 1981-11-18 1981-11-18 電極および配線の製造方法

Publications (2)

Publication Number Publication Date
JPS5886724A JPS5886724A (ja) 1983-05-24
JPH0361346B2 true JPH0361346B2 (OSRAM) 1991-09-19

Family

ID=16159510

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56184800A Granted JPS5886724A (ja) 1981-11-18 1981-11-18 電極および配線の製造方法

Country Status (1)

Country Link
JP (1) JPS5886724A (OSRAM)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60183726A (ja) * 1984-03-02 1985-09-19 Toshiba Corp 半導体装置の電極パタ−ンの形成方法
JPH07111969B2 (ja) * 1986-02-28 1995-11-29 株式会社東芝 半導体装置の製造方法
JPS6489470A (en) * 1987-09-30 1989-04-03 Mitsubishi Electric Corp Manufacture of semiconductor device
JP2707305B2 (ja) * 1989-01-26 1998-01-28 株式会社日立製作所 薄膜形成法とそれによって得られた半導体装置及びその製造方法
US5093274A (en) * 1990-02-02 1992-03-03 Mitsubishi Denki Kabushiki Kaisha Semiconductor device and method for manufacture thereof
KR100364810B1 (ko) * 2000-02-22 2002-12-16 주식회사 하이닉스반도체 반도체소자의 제조방법
JP4928098B2 (ja) * 2005-08-03 2012-05-09 セイコーエプソン株式会社 強誘電体キャパシタの製造方法
JP5057113B2 (ja) * 2009-11-17 2012-10-24 セイコーエプソン株式会社 半導体装置および電子部品並びにそれらの製造方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
THIN SOLID FILMS=1978 *

Also Published As

Publication number Publication date
JPS5886724A (ja) 1983-05-24

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