JPH0126172B2 - - Google Patents

Info

Publication number
JPH0126172B2
JPH0126172B2 JP55111317A JP11131780A JPH0126172B2 JP H0126172 B2 JPH0126172 B2 JP H0126172B2 JP 55111317 A JP55111317 A JP 55111317A JP 11131780 A JP11131780 A JP 11131780A JP H0126172 B2 JPH0126172 B2 JP H0126172B2
Authority
JP
Japan
Prior art keywords
film
opening
alloy
layer
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55111317A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5735318A (en
Inventor
Masanori Fukumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP11131780A priority Critical patent/JPS5735318A/ja
Publication of JPS5735318A publication Critical patent/JPS5735318A/ja
Publication of JPH0126172B2 publication Critical patent/JPH0126172B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10D64/011—

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP11131780A 1980-08-12 1980-08-12 Manufacture of semiconductor device Granted JPS5735318A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11131780A JPS5735318A (en) 1980-08-12 1980-08-12 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11131780A JPS5735318A (en) 1980-08-12 1980-08-12 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5735318A JPS5735318A (en) 1982-02-25
JPH0126172B2 true JPH0126172B2 (OSRAM) 1989-05-22

Family

ID=14558148

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11131780A Granted JPS5735318A (en) 1980-08-12 1980-08-12 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5735318A (OSRAM)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH088368B2 (ja) * 1985-06-07 1996-01-29 鐘淵化学工業株式会社 耐熱性薄膜光電変換素子の製法
US4751198A (en) * 1985-09-11 1988-06-14 Texas Instruments Incorporated Process for making contacts and interconnections using direct-reacted silicide
JPS62111421A (ja) * 1985-11-09 1987-05-22 Mitsubishi Electric Corp 金属シリサイド膜組成比制御方法
JPS62160745A (ja) * 1986-01-09 1987-07-16 Fuji Electric Co Ltd 半導体装置
JPS6439775A (en) * 1987-08-06 1989-02-10 Fuji Electric Co Ltd Formation of electrode film of semiconductor device

Also Published As

Publication number Publication date
JPS5735318A (en) 1982-02-25

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