JPH0348498B2 - - Google Patents
Info
- Publication number
- JPH0348498B2 JPH0348498B2 JP9949077A JP9949077A JPH0348498B2 JP H0348498 B2 JPH0348498 B2 JP H0348498B2 JP 9949077 A JP9949077 A JP 9949077A JP 9949077 A JP9949077 A JP 9949077A JP H0348498 B2 JPH0348498 B2 JP H0348498B2
- Authority
- JP
- Japan
- Prior art keywords
- plating layer
- mask
- photoresist
- patterns
- model
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007747 plating Methods 0.000 claims description 64
- 229920002120 photoresistant polymer Polymers 0.000 claims description 29
- 229910052751 metal Inorganic materials 0.000 claims description 21
- 239000002184 metal Substances 0.000 claims description 21
- 239000011347 resin Substances 0.000 claims description 11
- 229920005989 resin Polymers 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 6
- 238000002679 ablation Methods 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 claims description 2
- 238000004381 surface treatment Methods 0.000 claims description 2
- 230000003064 anti-oxidating effect Effects 0.000 claims 1
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000001259 photo etching Methods 0.000 description 6
- 238000005323 electroforming Methods 0.000 description 5
- 239000000839 emulsion Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- GGCZERPQGJTIQP-UHFFFAOYSA-N sodium;9,10-dioxoanthracene-2-sulfonic acid Chemical compound [Na+].C1=CC=C2C(=O)C3=CC(S(=O)(=O)O)=CC=C3C(=O)C2=C1 GGCZERPQGJTIQP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9949077A JPS5433671A (en) | 1977-08-22 | 1977-08-22 | Method of producing mask for photofabrication |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9949077A JPS5433671A (en) | 1977-08-22 | 1977-08-22 | Method of producing mask for photofabrication |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60115498A Division JPS612156A (ja) | 1985-05-30 | 1985-05-30 | フオトフアブリケーシヨン用マスクの製作方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5433671A JPS5433671A (en) | 1979-03-12 |
| JPH0348498B2 true JPH0348498B2 (ko) | 1991-07-24 |
Family
ID=14248735
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9949077A Granted JPS5433671A (en) | 1977-08-22 | 1977-08-22 | Method of producing mask for photofabrication |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5433671A (ko) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6064765U (ja) * | 1983-10-12 | 1985-05-08 | 長谷部 勉 | 食器洗浄機 |
| JPS60137962U (ja) * | 1984-02-27 | 1985-09-12 | 手塚興産株式会社 | 食器洗浄機 |
| JPS6147976U (ja) * | 1984-09-03 | 1986-03-31 | 手塚興産株式会社 | 食器洗い機 |
-
1977
- 1977-08-22 JP JP9949077A patent/JPS5433671A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5433671A (en) | 1979-03-12 |
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