JPH0346440B2 - - Google Patents

Info

Publication number
JPH0346440B2
JPH0346440B2 JP59004753A JP475384A JPH0346440B2 JP H0346440 B2 JPH0346440 B2 JP H0346440B2 JP 59004753 A JP59004753 A JP 59004753A JP 475384 A JP475384 A JP 475384A JP H0346440 B2 JPH0346440 B2 JP H0346440B2
Authority
JP
Japan
Prior art keywords
epitaxial layer
type epitaxial
pressure
raw material
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59004753A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60151298A (ja
Inventor
Shigenori Takagishi
Hideki Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP59004753A priority Critical patent/JPS60151298A/ja
Publication of JPS60151298A publication Critical patent/JPS60151298A/ja
Publication of JPH0346440B2 publication Critical patent/JPH0346440B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP59004753A 1984-01-17 1984-01-17 有機金属気相結晶成長方法 Granted JPS60151298A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59004753A JPS60151298A (ja) 1984-01-17 1984-01-17 有機金属気相結晶成長方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59004753A JPS60151298A (ja) 1984-01-17 1984-01-17 有機金属気相結晶成長方法

Publications (2)

Publication Number Publication Date
JPS60151298A JPS60151298A (ja) 1985-08-09
JPH0346440B2 true JPH0346440B2 (enExample) 1991-07-16

Family

ID=11592665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59004753A Granted JPS60151298A (ja) 1984-01-17 1984-01-17 有機金属気相結晶成長方法

Country Status (1)

Country Link
JP (1) JPS60151298A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4774775B2 (ja) * 2005-03-23 2011-09-14 日亜化学工業株式会社 トリアルキルガリウムの製造方法

Also Published As

Publication number Publication date
JPS60151298A (ja) 1985-08-09

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term