JPH0346260B2 - - Google Patents
Info
- Publication number
- JPH0346260B2 JPH0346260B2 JP61027233A JP2723386A JPH0346260B2 JP H0346260 B2 JPH0346260 B2 JP H0346260B2 JP 61027233 A JP61027233 A JP 61027233A JP 2723386 A JP2723386 A JP 2723386A JP H0346260 B2 JPH0346260 B2 JP H0346260B2
- Authority
- JP
- Japan
- Prior art keywords
- rotary table
- lower rotary
- wafer
- grinding device
- vertical direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61027233A JPS62188655A (ja) | 1986-02-10 | 1986-02-10 | ウエ−ハの外周研削装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61027233A JPS62188655A (ja) | 1986-02-10 | 1986-02-10 | ウエ−ハの外周研削装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62188655A JPS62188655A (ja) | 1987-08-18 |
JPH0346260B2 true JPH0346260B2 (enrdf_load_html_response) | 1991-07-15 |
Family
ID=12215353
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61027233A Granted JPS62188655A (ja) | 1986-02-10 | 1986-02-10 | ウエ−ハの外周研削装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62188655A (enrdf_load_html_response) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106808344B (zh) * | 2015-12-01 | 2021-06-15 | 保文明 | 平转石材线条双用连续磨机 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59183328U (ja) * | 1983-05-17 | 1984-12-06 | 不二越機械工業株式会社 | 研削装置 |
JPS6059110A (ja) * | 1983-09-12 | 1985-04-05 | Kanebo Silk Eregansu Kk | 繰糸装置 |
-
1986
- 1986-02-10 JP JP61027233A patent/JPS62188655A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS62188655A (ja) | 1987-08-18 |
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