JPH0346261B2 - - Google Patents
Info
- Publication number
- JPH0346261B2 JPH0346261B2 JP61027234A JP2723486A JPH0346261B2 JP H0346261 B2 JPH0346261 B2 JP H0346261B2 JP 61027234 A JP61027234 A JP 61027234A JP 2723486 A JP2723486 A JP 2723486A JP H0346261 B2 JPH0346261 B2 JP H0346261B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- rotary table
- lower rotary
- semiconductor wafer
- positioning device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61027234A JPS62188656A (ja) | 1986-02-10 | 1986-02-10 | ウエ−ハの外周研削装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61027234A JPS62188656A (ja) | 1986-02-10 | 1986-02-10 | ウエ−ハの外周研削装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62188656A JPS62188656A (ja) | 1987-08-18 |
| JPH0346261B2 true JPH0346261B2 (enrdf_load_html_response) | 1991-07-15 |
Family
ID=12215381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61027234A Granted JPS62188656A (ja) | 1986-02-10 | 1986-02-10 | ウエ−ハの外周研削装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62188656A (enrdf_load_html_response) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109676463A (zh) * | 2018-12-24 | 2019-04-26 | 广州市铭芯自动化控制设备有限公司 | 一种去毛机数控加工装置 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59183328U (ja) * | 1983-05-17 | 1984-12-06 | 不二越機械工業株式会社 | 研削装置 |
| JPS6059110A (ja) * | 1983-09-12 | 1985-04-05 | Kanebo Silk Eregansu Kk | 繰糸装置 |
| JPS6085536A (ja) * | 1983-10-17 | 1985-05-15 | Hitachi Ltd | ウエハ位置決め装置 |
-
1986
- 1986-02-10 JP JP61027234A patent/JPS62188656A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62188656A (ja) | 1987-08-18 |
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