JPS62188655A - ウエ−ハの外周研削装置 - Google Patents

ウエ−ハの外周研削装置

Info

Publication number
JPS62188655A
JPS62188655A JP61027233A JP2723386A JPS62188655A JP S62188655 A JPS62188655 A JP S62188655A JP 61027233 A JP61027233 A JP 61027233A JP 2723386 A JP2723386 A JP 2723386A JP S62188655 A JPS62188655 A JP S62188655A
Authority
JP
Japan
Prior art keywords
rotary table
lower rotary
wafer
axis
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61027233A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0346260B2 (enrdf_load_html_response
Inventor
Akira Kawaguchi
章 川口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Metal Corp
Original Assignee
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Metal Corp filed Critical Mitsubishi Metal Corp
Priority to JP61027233A priority Critical patent/JPS62188655A/ja
Publication of JPS62188655A publication Critical patent/JPS62188655A/ja
Publication of JPH0346260B2 publication Critical patent/JPH0346260B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
JP61027233A 1986-02-10 1986-02-10 ウエ−ハの外周研削装置 Granted JPS62188655A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61027233A JPS62188655A (ja) 1986-02-10 1986-02-10 ウエ−ハの外周研削装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61027233A JPS62188655A (ja) 1986-02-10 1986-02-10 ウエ−ハの外周研削装置

Publications (2)

Publication Number Publication Date
JPS62188655A true JPS62188655A (ja) 1987-08-18
JPH0346260B2 JPH0346260B2 (enrdf_load_html_response) 1991-07-15

Family

ID=12215353

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61027233A Granted JPS62188655A (ja) 1986-02-10 1986-02-10 ウエ−ハの外周研削装置

Country Status (1)

Country Link
JP (1) JPS62188655A (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106808344A (zh) * 2015-12-01 2017-06-09 保文明 平转石材线条双用连续磨机

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59183328U (ja) * 1983-05-17 1984-12-06 不二越機械工業株式会社 研削装置
JPS6059110A (ja) * 1983-09-12 1985-04-05 Kanebo Silk Eregansu Kk 繰糸装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59183328U (ja) * 1983-05-17 1984-12-06 不二越機械工業株式会社 研削装置
JPS6059110A (ja) * 1983-09-12 1985-04-05 Kanebo Silk Eregansu Kk 繰糸装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106808344A (zh) * 2015-12-01 2017-06-09 保文明 平转石材线条双用连续磨机

Also Published As

Publication number Publication date
JPH0346260B2 (enrdf_load_html_response) 1991-07-15

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