JPH0343233Y2 - - Google Patents

Info

Publication number
JPH0343233Y2
JPH0343233Y2 JP1987150602U JP15060287U JPH0343233Y2 JP H0343233 Y2 JPH0343233 Y2 JP H0343233Y2 JP 1987150602 U JP1987150602 U JP 1987150602U JP 15060287 U JP15060287 U JP 15060287U JP H0343233 Y2 JPH0343233 Y2 JP H0343233Y2
Authority
JP
Japan
Prior art keywords
substrate
pallet
annular holder
holding mechanism
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1987150602U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6453754U (instruction
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987150602U priority Critical patent/JPH0343233Y2/ja
Publication of JPS6453754U publication Critical patent/JPS6453754U/ja
Application granted granted Critical
Publication of JPH0343233Y2 publication Critical patent/JPH0343233Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1987150602U 1987-09-30 1987-09-30 Expired JPH0343233Y2 (instruction)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987150602U JPH0343233Y2 (instruction) 1987-09-30 1987-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987150602U JPH0343233Y2 (instruction) 1987-09-30 1987-09-30

Publications (2)

Publication Number Publication Date
JPS6453754U JPS6453754U (instruction) 1989-04-03
JPH0343233Y2 true JPH0343233Y2 (instruction) 1991-09-10

Family

ID=31423894

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987150602U Expired JPH0343233Y2 (instruction) 1987-09-30 1987-09-30

Country Status (1)

Country Link
JP (1) JPH0343233Y2 (instruction)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2892723B2 (ja) * 1989-12-20 1999-05-17 松下電器産業株式会社 スパッタリング装置
JPH0826455B2 (ja) * 1990-06-20 1996-03-13 株式会社日立製作所 スパツタリング装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS579116Y2 (instruction) * 1979-06-16 1982-02-22

Also Published As

Publication number Publication date
JPS6453754U (instruction) 1989-04-03

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