JPH0340333B2 - - Google Patents

Info

Publication number
JPH0340333B2
JPH0340333B2 JP58011395A JP1139583A JPH0340333B2 JP H0340333 B2 JPH0340333 B2 JP H0340333B2 JP 58011395 A JP58011395 A JP 58011395A JP 1139583 A JP1139583 A JP 1139583A JP H0340333 B2 JPH0340333 B2 JP H0340333B2
Authority
JP
Japan
Prior art keywords
hole
light
printed board
shielding
conductive layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58011395A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59150328A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1139583A priority Critical patent/JPS59150328A/ja
Priority to US06/554,543 priority patent/US4560273A/en
Priority to EP83307291A priority patent/EP0111404B1/en
Priority to DE8383307291T priority patent/DE3377527D1/de
Publication of JPS59150328A publication Critical patent/JPS59150328A/ja
Publication of JPH0340333B2 publication Critical patent/JPH0340333B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95692—Patterns showing hole parts, e.g. honeycomb filtering structures

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP1139583A 1982-11-30 1983-01-28 スル−ホ−ル検査装置 Granted JPS59150328A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP1139583A JPS59150328A (ja) 1983-01-28 1983-01-28 スル−ホ−ル検査装置
US06/554,543 US4560273A (en) 1982-11-30 1983-11-23 Method and apparatus for inspecting plated through holes in printed circuit boards
EP83307291A EP0111404B1 (en) 1982-11-30 1983-11-30 Method and apparatus for inspecting plated through holes in printed circuit boards
DE8383307291T DE3377527D1 (en) 1982-11-30 1983-11-30 Method and apparatus for inspecting plated through holes in printed circuit boards

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1139583A JPS59150328A (ja) 1983-01-28 1983-01-28 スル−ホ−ル検査装置

Publications (2)

Publication Number Publication Date
JPS59150328A JPS59150328A (ja) 1984-08-28
JPH0340333B2 true JPH0340333B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-06-18

Family

ID=11776818

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1139583A Granted JPS59150328A (ja) 1982-11-30 1983-01-28 スル−ホ−ル検査装置

Country Status (1)

Country Link
JP (1) JPS59150328A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101482869B1 (ko) * 2013-07-25 2015-01-16 (주)토탈솔루션 홀 검사장치
TW202200995A (zh) * 2020-06-24 2022-01-01 由田新技股份有限公司 孔洞檢測系統以及孔洞檢測方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55142254A (en) * 1979-04-25 1980-11-06 Hitachi Ltd Inspecting method for pattern of printed wiring board

Also Published As

Publication number Publication date
JPS59150328A (ja) 1984-08-28

Similar Documents

Publication Publication Date Title
JP3817427B2 (ja) 半導体の構成
EP0126492A2 (en) Circuit board inspection apparatus and method
JPS6229737B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6017044B2 (ja) 印刷配線板のパタ−ン検査装置
KR100671770B1 (ko) 패턴 검사 장치
JPH10332792A (ja) 基板検査用カメラの照明装置
JPS6225221B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
KR20050018822A (ko) 자동 광학 검사 장치
JPS62127652A (ja) 半導体ウエハの表面欠陥検査装置
JPH0340333B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP2537543B2 (ja) プリント配線板の回路パタ―ン検査装置
KR100333222B1 (ko) 연결 볼들의 존재를 검사하기 위한 방법
JPH0332732B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS5970947A (ja) 印刷配線基板のパタ−ン検出方法
JP2503201B2 (ja) スル−ホ−ル検査装置
JPS6221045A (ja) スル−ホ−ル検査装置
JPS6175240A (ja) スルホ−ル検査装置
JPS6074528A (ja) レジストパタ−ン検査装置
JPS6085308A (ja) スル−ホ−ル欠陥検査法
JPH02122246A (ja) プリント配線基板のスルーホール検査装置
JPS617404A (ja) 位置検出装置
JPH049251B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS59125695A (ja) プリント板のスル−ホ−ル検査装置
JPH0332731B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6010157A (ja) スル−ホ−ル検査装置