JPH0337728B2 - - Google Patents

Info

Publication number
JPH0337728B2
JPH0337728B2 JP56065542A JP6554281A JPH0337728B2 JP H0337728 B2 JPH0337728 B2 JP H0337728B2 JP 56065542 A JP56065542 A JP 56065542A JP 6554281 A JP6554281 A JP 6554281A JP H0337728 B2 JPH0337728 B2 JP H0337728B2
Authority
JP
Japan
Prior art keywords
polycrystalline
amorphous silicon
silicon
polysilicon layer
annealing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56065542A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57180116A (en
Inventor
Junji Sakurai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP6554281A priority Critical patent/JPS57180116A/ja
Publication of JPS57180116A publication Critical patent/JPS57180116A/ja
Publication of JPH0337728B2 publication Critical patent/JPH0337728B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/02—Liquid-phase epitaxial-layer growth using molten solvents, e.g. flux

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Recrystallisation Techniques (AREA)
JP6554281A 1981-04-30 1981-04-30 Manufacture of semiconductor device Granted JPS57180116A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6554281A JPS57180116A (en) 1981-04-30 1981-04-30 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6554281A JPS57180116A (en) 1981-04-30 1981-04-30 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS57180116A JPS57180116A (en) 1982-11-06
JPH0337728B2 true JPH0337728B2 (en, 2012) 1991-06-06

Family

ID=13290003

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6554281A Granted JPS57180116A (en) 1981-04-30 1981-04-30 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS57180116A (en, 2012)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5578520A (en) 1991-05-28 1996-11-26 Semiconductor Energy Laboratory Co., Ltd. Method for annealing a semiconductor
JPH05182923A (ja) * 1991-05-28 1993-07-23 Semiconductor Energy Lab Co Ltd レーザーアニール方法
US5766344A (en) 1991-09-21 1998-06-16 Semiconductor Energy Laboratory Co., Ltd. Method for forming a semiconductor
JPH05235039A (ja) * 1992-02-19 1993-09-10 Casio Comput Co Ltd 薄膜トランジスタの製造方法
JP3063018B2 (ja) * 1992-02-19 2000-07-12 カシオ計算機株式会社 薄膜トランジスタの製造方法
JP3082164B2 (ja) * 1994-04-15 2000-08-28 株式会社半導体エネルギー研究所 レーザー処理方法及び半導体装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
APPL.PHYS.LETT=1978 *

Also Published As

Publication number Publication date
JPS57180116A (en) 1982-11-06

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