JPH0334236B2 - - Google Patents

Info

Publication number
JPH0334236B2
JPH0334236B2 JP61024966A JP2496686A JPH0334236B2 JP H0334236 B2 JPH0334236 B2 JP H0334236B2 JP 61024966 A JP61024966 A JP 61024966A JP 2496686 A JP2496686 A JP 2496686A JP H0334236 B2 JPH0334236 B2 JP H0334236B2
Authority
JP
Japan
Prior art keywords
superconducting
electrode
integrated circuit
metal film
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61024966A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62183573A (ja
Inventor
Mikio Hirano
Hideaki Nakane
Yoshinobu Taruya
Ushio Kawabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP61024966A priority Critical patent/JPS62183573A/ja
Publication of JPS62183573A publication Critical patent/JPS62183573A/ja
Publication of JPH0334236B2 publication Critical patent/JPH0334236B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP61024966A 1986-02-08 1986-02-08 超電導集積回路 Granted JPS62183573A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61024966A JPS62183573A (ja) 1986-02-08 1986-02-08 超電導集積回路

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61024966A JPS62183573A (ja) 1986-02-08 1986-02-08 超電導集積回路

Publications (2)

Publication Number Publication Date
JPS62183573A JPS62183573A (ja) 1987-08-11
JPH0334236B2 true JPH0334236B2 (cs) 1991-05-21

Family

ID=12152711

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61024966A Granted JPS62183573A (ja) 1986-02-08 1986-02-08 超電導集積回路

Country Status (1)

Country Link
JP (1) JPS62183573A (cs)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS616882A (ja) * 1984-06-21 1986-01-13 Agency Of Ind Science & Technol 超電導集積回路の端子電極とその製造方法

Also Published As

Publication number Publication date
JPS62183573A (ja) 1987-08-11

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term