JPH0331082Y2 - - Google Patents

Info

Publication number
JPH0331082Y2
JPH0331082Y2 JP6472882U JP6472882U JPH0331082Y2 JP H0331082 Y2 JPH0331082 Y2 JP H0331082Y2 JP 6472882 U JP6472882 U JP 6472882U JP 6472882 U JP6472882 U JP 6472882U JP H0331082 Y2 JPH0331082 Y2 JP H0331082Y2
Authority
JP
Japan
Prior art keywords
wafer
suction
concentric
suction hole
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6472882U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58168139U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6472882U priority Critical patent/JPS58168139U/ja
Publication of JPS58168139U publication Critical patent/JPS58168139U/ja
Application granted granted Critical
Publication of JPH0331082Y2 publication Critical patent/JPH0331082Y2/ja
Granted legal-status Critical Current

Links

JP6472882U 1982-04-30 1982-04-30 半導体ウエハの吸着保持装置 Granted JPS58168139U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6472882U JPS58168139U (ja) 1982-04-30 1982-04-30 半導体ウエハの吸着保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6472882U JPS58168139U (ja) 1982-04-30 1982-04-30 半導体ウエハの吸着保持装置

Publications (2)

Publication Number Publication Date
JPS58168139U JPS58168139U (ja) 1983-11-09
JPH0331082Y2 true JPH0331082Y2 (enrdf_load_stackoverflow) 1991-07-01

Family

ID=30074742

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6472882U Granted JPS58168139U (ja) 1982-04-30 1982-04-30 半導体ウエハの吸着保持装置

Country Status (1)

Country Link
JP (1) JPS58168139U (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2821678B2 (ja) * 1997-04-07 1998-11-05 株式会社ニコン 基板の吸着装置
JP2016096294A (ja) * 2014-11-17 2016-05-26 株式会社ディスコ 吸着パッド

Also Published As

Publication number Publication date
JPS58168139U (ja) 1983-11-09

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