JPH0327454B2 - - Google Patents
Info
- Publication number
- JPH0327454B2 JPH0327454B2 JP60231933A JP23193385A JPH0327454B2 JP H0327454 B2 JPH0327454 B2 JP H0327454B2 JP 60231933 A JP60231933 A JP 60231933A JP 23193385 A JP23193385 A JP 23193385A JP H0327454 B2 JPH0327454 B2 JP H0327454B2
- Authority
- JP
- Japan
- Prior art keywords
- movable body
- electromagnet
- linear motor
- box
- shaped duct
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000005294 ferromagnetic effect Effects 0.000 claims description 7
- 238000007667 floating Methods 0.000 claims description 5
- 101700004678 SLIT3 Proteins 0.000 description 5
- 102100027339 Slit homolog 3 protein Human genes 0.000 description 5
- 238000005339 levitation Methods 0.000 description 4
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000003302 ferromagnetic material Substances 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Non-Mechanical Conveyors (AREA)
- Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23193385A JPS6293120A (ja) | 1985-10-16 | 1985-10-16 | リニアモ−タ使用の荷搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23193385A JPS6293120A (ja) | 1985-10-16 | 1985-10-16 | リニアモ−タ使用の荷搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6293120A JPS6293120A (ja) | 1987-04-28 |
| JPH0327454B2 true JPH0327454B2 (ru) | 1991-04-16 |
Family
ID=16931337
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23193385A Granted JPS6293120A (ja) | 1985-10-16 | 1985-10-16 | リニアモ−タ使用の荷搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6293120A (ru) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0638427Y2 (ja) * | 1987-06-16 | 1994-10-05 | 東京エレクトロン東北株式会社 | 磁気浮上型ウエハ搬送装置 |
| JPH0759208A (ja) * | 1993-08-13 | 1995-03-03 | Murata Mach Ltd | リニア搬送台車の保持装置 |
| JP5202532B2 (ja) * | 2007-09-07 | 2013-06-05 | 東北精機工業株式会社 | 太陽電池モジュール搬送ライン |
| JP2009176161A (ja) * | 2008-01-25 | 2009-08-06 | Toshiba Corp | 電子機器 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60170401A (ja) * | 1984-02-14 | 1985-09-03 | Toshiba Corp | 浮上式搬送装置 |
-
1985
- 1985-10-16 JP JP23193385A patent/JPS6293120A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60170401A (ja) * | 1984-02-14 | 1985-09-03 | Toshiba Corp | 浮上式搬送装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6293120A (ja) | 1987-04-28 |
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