JPH0326447Y2 - - Google Patents
Info
- Publication number
- JPH0326447Y2 JPH0326447Y2 JP7843484U JP7843484U JPH0326447Y2 JP H0326447 Y2 JPH0326447 Y2 JP H0326447Y2 JP 7843484 U JP7843484 U JP 7843484U JP 7843484 U JP7843484 U JP 7843484U JP H0326447 Y2 JPH0326447 Y2 JP H0326447Y2
- Authority
- JP
- Japan
- Prior art keywords
- light
- light receiving
- measured
- section
- optical system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007547 defect Effects 0.000 claims description 20
- 230000003287 optical effect Effects 0.000 claims description 20
- 238000001514 detection method Methods 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 8
- 230000007423 decrease Effects 0.000 description 7
- 230000002238 attenuated effect Effects 0.000 description 5
- 230000002950 deficient Effects 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- 238000007689 inspection Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7843484U JPS60189840U (ja) | 1984-05-28 | 1984-05-28 | 表面不良検知装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7843484U JPS60189840U (ja) | 1984-05-28 | 1984-05-28 | 表面不良検知装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60189840U JPS60189840U (ja) | 1985-12-16 |
| JPH0326447Y2 true JPH0326447Y2 (nl) | 1991-06-07 |
Family
ID=30622410
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7843484U Granted JPS60189840U (ja) | 1984-05-28 | 1984-05-28 | 表面不良検知装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60189840U (nl) |
-
1984
- 1984-05-28 JP JP7843484U patent/JPS60189840U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60189840U (ja) | 1985-12-16 |
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