JPH0324784B2 - - Google Patents

Info

Publication number
JPH0324784B2
JPH0324784B2 JP58112027A JP11202783A JPH0324784B2 JP H0324784 B2 JPH0324784 B2 JP H0324784B2 JP 58112027 A JP58112027 A JP 58112027A JP 11202783 A JP11202783 A JP 11202783A JP H0324784 B2 JPH0324784 B2 JP H0324784B2
Authority
JP
Japan
Prior art keywords
film
nitride film
wiring
silicon nitride
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58112027A
Other languages
English (en)
Japanese (ja)
Other versions
JPS604239A (ja
Inventor
Yasuhiko Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP11202783A priority Critical patent/JPS604239A/ja
Publication of JPS604239A publication Critical patent/JPS604239A/ja
Publication of JPH0324784B2 publication Critical patent/JPH0324784B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP11202783A 1983-06-22 1983-06-22 半導体装置及びその製造方法 Granted JPS604239A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11202783A JPS604239A (ja) 1983-06-22 1983-06-22 半導体装置及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11202783A JPS604239A (ja) 1983-06-22 1983-06-22 半導体装置及びその製造方法

Publications (2)

Publication Number Publication Date
JPS604239A JPS604239A (ja) 1985-01-10
JPH0324784B2 true JPH0324784B2 (OSRAM) 1991-04-04

Family

ID=14576160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11202783A Granted JPS604239A (ja) 1983-06-22 1983-06-22 半導体装置及びその製造方法

Country Status (1)

Country Link
JP (1) JPS604239A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63258043A (ja) * 1987-04-15 1988-10-25 Nec Corp 半導体装置の製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5633899A (en) * 1979-08-29 1981-04-04 Cho Lsi Gijutsu Kenkyu Kumiai Method of forming multilayer wire
JPS5886746A (ja) * 1981-11-19 1983-05-24 Nec Corp 半導体装置

Also Published As

Publication number Publication date
JPS604239A (ja) 1985-01-10

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