JPH0322697B2 - - Google Patents
Info
- Publication number
- JPH0322697B2 JPH0322697B2 JP25617085A JP25617085A JPH0322697B2 JP H0322697 B2 JPH0322697 B2 JP H0322697B2 JP 25617085 A JP25617085 A JP 25617085A JP 25617085 A JP25617085 A JP 25617085A JP H0322697 B2 JPH0322697 B2 JP H0322697B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- fet
- microwave
- measurement system
- coplanar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 27
- 238000005259 measurement Methods 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 11
- 230000005669 field effect Effects 0.000 claims description 7
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 239000000523 sample Substances 0.000 description 15
- 230000005540 biological transmission Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Junction Field-Effect Transistors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25617085A JPS62115783A (ja) | 1985-11-14 | 1985-11-14 | 半導体装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25617085A JPS62115783A (ja) | 1985-11-14 | 1985-11-14 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62115783A JPS62115783A (ja) | 1987-05-27 |
JPH0322697B2 true JPH0322697B2 (enrdf_load_stackoverflow) | 1991-03-27 |
Family
ID=17288880
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP25617085A Granted JPS62115783A (ja) | 1985-11-14 | 1985-11-14 | 半導体装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62115783A (enrdf_load_stackoverflow) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3235476B2 (ja) * | 1996-06-28 | 2001-12-04 | 株式会社村田製作所 | 高周波半導体デバイス |
JP3189691B2 (ja) * | 1996-07-10 | 2001-07-16 | 株式会社村田製作所 | 高周波半導体デバイス |
TW328645B (en) * | 1997-04-14 | 1998-03-21 | Chyng-Guang Juang | The package for dual mode micro/nano-meter wave IC |
KR100686438B1 (ko) * | 2004-09-22 | 2007-02-23 | 학교법인 동국대학교 | 초고주파 반도체 소자 |
-
1985
- 1985-11-14 JP JP25617085A patent/JPS62115783A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS62115783A (ja) | 1987-05-27 |
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