JPH0322697B2 - - Google Patents

Info

Publication number
JPH0322697B2
JPH0322697B2 JP25617085A JP25617085A JPH0322697B2 JP H0322697 B2 JPH0322697 B2 JP H0322697B2 JP 25617085 A JP25617085 A JP 25617085A JP 25617085 A JP25617085 A JP 25617085A JP H0322697 B2 JPH0322697 B2 JP H0322697B2
Authority
JP
Japan
Prior art keywords
semiconductor device
fet
microwave
measurement system
coplanar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP25617085A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62115783A (ja
Inventor
Nagisa Ayaki
Yoshinobu Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP25617085A priority Critical patent/JPS62115783A/ja
Publication of JPS62115783A publication Critical patent/JPS62115783A/ja
Publication of JPH0322697B2 publication Critical patent/JPH0322697B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Junction Field-Effect Transistors (AREA)
JP25617085A 1985-11-14 1985-11-14 半導体装置 Granted JPS62115783A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25617085A JPS62115783A (ja) 1985-11-14 1985-11-14 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25617085A JPS62115783A (ja) 1985-11-14 1985-11-14 半導体装置

Publications (2)

Publication Number Publication Date
JPS62115783A JPS62115783A (ja) 1987-05-27
JPH0322697B2 true JPH0322697B2 (enrdf_load_stackoverflow) 1991-03-27

Family

ID=17288880

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25617085A Granted JPS62115783A (ja) 1985-11-14 1985-11-14 半導体装置

Country Status (1)

Country Link
JP (1) JPS62115783A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3235476B2 (ja) * 1996-06-28 2001-12-04 株式会社村田製作所 高周波半導体デバイス
JP3189691B2 (ja) * 1996-07-10 2001-07-16 株式会社村田製作所 高周波半導体デバイス
TW328645B (en) * 1997-04-14 1998-03-21 Chyng-Guang Juang The package for dual mode micro/nano-meter wave IC
KR100686438B1 (ko) * 2004-09-22 2007-02-23 학교법인 동국대학교 초고주파 반도체 소자

Also Published As

Publication number Publication date
JPS62115783A (ja) 1987-05-27

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