JPH0319619B2 - - Google Patents

Info

Publication number
JPH0319619B2
JPH0319619B2 JP56178844A JP17884481A JPH0319619B2 JP H0319619 B2 JPH0319619 B2 JP H0319619B2 JP 56178844 A JP56178844 A JP 56178844A JP 17884481 A JP17884481 A JP 17884481A JP H0319619 B2 JPH0319619 B2 JP H0319619B2
Authority
JP
Japan
Prior art keywords
film
substrate
present
rotation
cans
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56178844A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5880134A (ja
Inventor
Koichi Shinohara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP17884481A priority Critical patent/JPS5880134A/ja
Publication of JPS5880134A publication Critical patent/JPS5880134A/ja
Publication of JPH0319619B2 publication Critical patent/JPH0319619B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/85—Coating a support with a magnetic layer by vapour deposition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Thin Magnetic Films (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP17884481A 1981-11-06 1981-11-06 磁気記録媒体の製造方法 Granted JPS5880134A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17884481A JPS5880134A (ja) 1981-11-06 1981-11-06 磁気記録媒体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17884481A JPS5880134A (ja) 1981-11-06 1981-11-06 磁気記録媒体の製造方法

Publications (2)

Publication Number Publication Date
JPS5880134A JPS5880134A (ja) 1983-05-14
JPH0319619B2 true JPH0319619B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-03-15

Family

ID=16055652

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17884481A Granted JPS5880134A (ja) 1981-11-06 1981-11-06 磁気記録媒体の製造方法

Country Status (1)

Country Link
JP (1) JPS5880134A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57101663A (en) * 1980-12-16 1982-06-24 Olympus Optical Co Ltd Apparatus for forming thin film

Also Published As

Publication number Publication date
JPS5880134A (ja) 1983-05-14

Similar Documents

Publication Publication Date Title
JPH0319619B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0319618B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6126939A (ja) 磁気記録媒体の製造方法
JP2546268B2 (ja) 垂直磁気記録媒体
JPH0581967B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
US4526131A (en) Magnetic recording medium manufacturing apparatus
JPS6174143A (ja) 磁気記録媒体の製造方法
JPH0319617B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP2894253B2 (ja) 高機能性薄膜の製造方法
JP3173541B2 (ja) 磁気記録媒体の製造装置および製造方法
JP2946748B2 (ja) 磁気記録媒体の製造方法
JPH0319622B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0467433A (ja) 磁気記録媒体の製造方法
JPS59148126A (ja) 垂直記録用磁気記録媒体
JPS6174142A (ja) 磁気記録媒体の製造方法
JPH0612649A (ja) 磁気記録媒体
JPH01303623A (ja) 磁気記録媒体
JPH054724B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH04132015A (ja) ＣｏＣｒ垂直磁気記録テープおよびその製造方法
JPS58199440A (ja) 磁気記録媒体の製造方法
JPS62295219A (ja) 垂直磁気記録媒体の製造方法
JPS6156563B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH10105951A (ja) 磁気記録媒体
JPS58133625A (ja) 磁気記録媒体
JPS615425A (ja) 磁気記録媒体