JPH0291340U - - Google Patents

Info

Publication number
JPH0291340U
JPH0291340U JP16939788U JP16939788U JPH0291340U JP H0291340 U JPH0291340 U JP H0291340U JP 16939788 U JP16939788 U JP 16939788U JP 16939788 U JP16939788 U JP 16939788U JP H0291340 U JPH0291340 U JP H0291340U
Authority
JP
Japan
Prior art keywords
substrate
chamber
heating chamber
cart
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16939788U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0610679Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16939788U priority Critical patent/JPH0610679Y2/ja
Publication of JPH0291340U publication Critical patent/JPH0291340U/ja
Application granted granted Critical
Publication of JPH0610679Y2 publication Critical patent/JPH0610679Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP16939788U 1988-12-29 1988-12-29 連続インライン式成膜装置 Expired - Lifetime JPH0610679Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16939788U JPH0610679Y2 (ja) 1988-12-29 1988-12-29 連続インライン式成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16939788U JPH0610679Y2 (ja) 1988-12-29 1988-12-29 連続インライン式成膜装置

Publications (2)

Publication Number Publication Date
JPH0291340U true JPH0291340U (enrdf_load_stackoverflow) 1990-07-19
JPH0610679Y2 JPH0610679Y2 (ja) 1994-03-16

Family

ID=31459417

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16939788U Expired - Lifetime JPH0610679Y2 (ja) 1988-12-29 1988-12-29 連続インライン式成膜装置

Country Status (1)

Country Link
JP (1) JPH0610679Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010114458A (ja) * 2001-08-16 2010-05-20 First Solar Inc 化学蒸着システム
JP2017082342A (ja) * 2012-10-18 2017-05-18 株式会社アルバック 成膜装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010114458A (ja) * 2001-08-16 2010-05-20 First Solar Inc 化学蒸着システム
JP2017082342A (ja) * 2012-10-18 2017-05-18 株式会社アルバック 成膜装置

Also Published As

Publication number Publication date
JPH0610679Y2 (ja) 1994-03-16

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