JPS6255341U - - Google Patents

Info

Publication number
JPS6255341U
JPS6255341U JP14760785U JP14760785U JPS6255341U JP S6255341 U JPS6255341 U JP S6255341U JP 14760785 U JP14760785 U JP 14760785U JP 14760785 U JP14760785 U JP 14760785U JP S6255341 U JPS6255341 U JP S6255341U
Authority
JP
Japan
Prior art keywords
hot plate
photoresist
coated
semiconductor substrate
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14760785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14760785U priority Critical patent/JPS6255341U/ja
Publication of JPS6255341U publication Critical patent/JPS6255341U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP14760785U 1985-09-26 1985-09-26 Pending JPS6255341U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14760785U JPS6255341U (enrdf_load_stackoverflow) 1985-09-26 1985-09-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14760785U JPS6255341U (enrdf_load_stackoverflow) 1985-09-26 1985-09-26

Publications (1)

Publication Number Publication Date
JPS6255341U true JPS6255341U (enrdf_load_stackoverflow) 1987-04-06

Family

ID=31061121

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14760785U Pending JPS6255341U (enrdf_load_stackoverflow) 1985-09-26 1985-09-26

Country Status (1)

Country Link
JP (1) JPS6255341U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01168026A (ja) * 1987-12-23 1989-07-03 Teru Kyushu Kk ベーキング装置
JPH07161632A (ja) * 1993-07-16 1995-06-23 Semiconductor Syst Inc 基板コーティング／現像システム用熱処理モジュール

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01168026A (ja) * 1987-12-23 1989-07-03 Teru Kyushu Kk ベーキング装置
JPH07161632A (ja) * 1993-07-16 1995-06-23 Semiconductor Syst Inc 基板コーティング／現像システム用熱処理モジュール

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