JPH01160445U - - Google Patents
Info
- Publication number
- JPH01160445U JPH01160445U JP5500288U JP5500288U JPH01160445U JP H01160445 U JPH01160445 U JP H01160445U JP 5500288 U JP5500288 U JP 5500288U JP 5500288 U JP5500288 U JP 5500288U JP H01160445 U JPH01160445 U JP H01160445U
- Authority
- JP
- Japan
- Prior art keywords
- heat
- retaining cover
- belt
- hot plate
- nitrogen gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 229920002120 photoresistant polymer Polymers 0.000 claims description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
- 229910001873 dinitrogen Inorganic materials 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 230000002950 deficient Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5500288U JPH01160445U (enrdf_load_stackoverflow) | 1988-04-22 | 1988-04-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5500288U JPH01160445U (enrdf_load_stackoverflow) | 1988-04-22 | 1988-04-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01160445U true JPH01160445U (enrdf_load_stackoverflow) | 1989-11-07 |
Family
ID=31280910
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5500288U Pending JPH01160445U (enrdf_load_stackoverflow) | 1988-04-22 | 1988-04-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01160445U (enrdf_load_stackoverflow) |
-
1988
- 1988-04-22 JP JP5500288U patent/JPH01160445U/ja active Pending
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