JPS6170928U - - Google Patents

Info

Publication number
JPS6170928U
JPS6170928U JP15677284U JP15677284U JPS6170928U JP S6170928 U JPS6170928 U JP S6170928U JP 15677284 U JP15677284 U JP 15677284U JP 15677284 U JP15677284 U JP 15677284U JP S6170928 U JPS6170928 U JP S6170928U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
heater
room
heating
held
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15677284U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15677284U priority Critical patent/JPS6170928U/ja
Publication of JPS6170928U publication Critical patent/JPS6170928U/ja
Pending legal-status Critical Current

Links

JP15677284U 1984-10-16 1984-10-16 Pending JPS6170928U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15677284U JPS6170928U (enrdf_load_stackoverflow) 1984-10-16 1984-10-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15677284U JPS6170928U (enrdf_load_stackoverflow) 1984-10-16 1984-10-16

Publications (1)

Publication Number Publication Date
JPS6170928U true JPS6170928U (enrdf_load_stackoverflow) 1986-05-15

Family

ID=30714778

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15677284U Pending JPS6170928U (enrdf_load_stackoverflow) 1984-10-16 1984-10-16

Country Status (1)

Country Link
JP (1) JPS6170928U (enrdf_load_stackoverflow)

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