JPS63147814U - - Google Patents

Info

Publication number
JPS63147814U
JPS63147814U JP4013387U JP4013387U JPS63147814U JP S63147814 U JPS63147814 U JP S63147814U JP 4013387 U JP4013387 U JP 4013387U JP 4013387 U JP4013387 U JP 4013387U JP S63147814 U JPS63147814 U JP S63147814U
Authority
JP
Japan
Prior art keywords
susceptor
heater block
vapor deposition
atmospheric pressure
chemical vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4013387U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0539627Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987040133U priority Critical patent/JPH0539627Y2/ja
Publication of JPS63147814U publication Critical patent/JPS63147814U/ja
Application granted granted Critical
Publication of JPH0539627Y2 publication Critical patent/JPH0539627Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987040133U 1987-03-18 1987-03-18 Expired - Lifetime JPH0539627Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987040133U JPH0539627Y2 (enrdf_load_stackoverflow) 1987-03-18 1987-03-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987040133U JPH0539627Y2 (enrdf_load_stackoverflow) 1987-03-18 1987-03-18

Publications (2)

Publication Number Publication Date
JPS63147814U true JPS63147814U (enrdf_load_stackoverflow) 1988-09-29
JPH0539627Y2 JPH0539627Y2 (enrdf_load_stackoverflow) 1993-10-07

Family

ID=30853945

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987040133U Expired - Lifetime JPH0539627Y2 (enrdf_load_stackoverflow) 1987-03-18 1987-03-18

Country Status (1)

Country Link
JP (1) JPH0539627Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5887814A (ja) * 1981-11-20 1983-05-25 Seiko Epson Corp 非晶質半導体膜製造装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5887814A (ja) * 1981-11-20 1983-05-25 Seiko Epson Corp 非晶質半導体膜製造装置

Also Published As

Publication number Publication date
JPH0539627Y2 (enrdf_load_stackoverflow) 1993-10-07

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