JPH0539627Y2 - - Google Patents

Info

Publication number
JPH0539627Y2
JPH0539627Y2 JP1987040133U JP4013387U JPH0539627Y2 JP H0539627 Y2 JPH0539627 Y2 JP H0539627Y2 JP 1987040133 U JP1987040133 U JP 1987040133U JP 4013387 U JP4013387 U JP 4013387U JP H0539627 Y2 JPH0539627 Y2 JP H0539627Y2
Authority
JP
Japan
Prior art keywords
susceptor
heater block
pressure chemical
wafer
fixing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987040133U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63147814U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987040133U priority Critical patent/JPH0539627Y2/ja
Publication of JPS63147814U publication Critical patent/JPS63147814U/ja
Application granted granted Critical
Publication of JPH0539627Y2 publication Critical patent/JPH0539627Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987040133U 1987-03-18 1987-03-18 Expired - Lifetime JPH0539627Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987040133U JPH0539627Y2 (enrdf_load_stackoverflow) 1987-03-18 1987-03-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987040133U JPH0539627Y2 (enrdf_load_stackoverflow) 1987-03-18 1987-03-18

Publications (2)

Publication Number Publication Date
JPS63147814U JPS63147814U (enrdf_load_stackoverflow) 1988-09-29
JPH0539627Y2 true JPH0539627Y2 (enrdf_load_stackoverflow) 1993-10-07

Family

ID=30853945

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987040133U Expired - Lifetime JPH0539627Y2 (enrdf_load_stackoverflow) 1987-03-18 1987-03-18

Country Status (1)

Country Link
JP (1) JPH0539627Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5887814A (ja) * 1981-11-20 1983-05-25 Seiko Epson Corp 非晶質半導体膜製造装置

Also Published As

Publication number Publication date
JPS63147814U (enrdf_load_stackoverflow) 1988-09-29

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