JPS63142825U - - Google Patents

Info

Publication number
JPS63142825U
JPS63142825U JP3619987U JP3619987U JPS63142825U JP S63142825 U JPS63142825 U JP S63142825U JP 3619987 U JP3619987 U JP 3619987U JP 3619987 U JP3619987 U JP 3619987U JP S63142825 U JPS63142825 U JP S63142825U
Authority
JP
Japan
Prior art keywords
susceptor
barrel
vapor phase
phase growth
flat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3619987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3619987U priority Critical patent/JPS63142825U/ja
Publication of JPS63142825U publication Critical patent/JPS63142825U/ja
Pending legal-status Critical Current

Links

JP3619987U 1987-03-12 1987-03-12 Pending JPS63142825U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3619987U JPS63142825U (enrdf_load_stackoverflow) 1987-03-12 1987-03-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3619987U JPS63142825U (enrdf_load_stackoverflow) 1987-03-12 1987-03-12

Publications (1)

Publication Number Publication Date
JPS63142825U true JPS63142825U (enrdf_load_stackoverflow) 1988-09-20

Family

ID=30846384

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3619987U Pending JPS63142825U (enrdf_load_stackoverflow) 1987-03-12 1987-03-12

Country Status (1)

Country Link
JP (1) JPS63142825U (enrdf_load_stackoverflow)

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