JPS61172169U - - Google Patents

Info

Publication number
JPS61172169U
JPS61172169U JP5587185U JP5587185U JPS61172169U JP S61172169 U JPS61172169 U JP S61172169U JP 5587185 U JP5587185 U JP 5587185U JP 5587185 U JP5587185 U JP 5587185U JP S61172169 U JPS61172169 U JP S61172169U
Authority
JP
Japan
Prior art keywords
nozzle
vapor phase
ejection ports
phase growth
nozzle device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5587185U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0345955Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5587185U priority Critical patent/JPH0345955Y2/ja
Publication of JPS61172169U publication Critical patent/JPS61172169U/ja
Application granted granted Critical
Publication of JPH0345955Y2 publication Critical patent/JPH0345955Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP5587185U 1985-04-15 1985-04-15 Expired JPH0345955Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5587185U JPH0345955Y2 (enrdf_load_stackoverflow) 1985-04-15 1985-04-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5587185U JPH0345955Y2 (enrdf_load_stackoverflow) 1985-04-15 1985-04-15

Publications (2)

Publication Number Publication Date
JPS61172169U true JPS61172169U (enrdf_load_stackoverflow) 1986-10-25
JPH0345955Y2 JPH0345955Y2 (enrdf_load_stackoverflow) 1991-09-27

Family

ID=30578952

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5587185U Expired JPH0345955Y2 (enrdf_load_stackoverflow) 1985-04-15 1985-04-15

Country Status (1)

Country Link
JP (1) JPH0345955Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0345955Y2 (enrdf_load_stackoverflow) 1991-09-27

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