JPH0365239U - - Google Patents

Info

Publication number
JPH0365239U
JPH0365239U JP12663289U JP12663289U JPH0365239U JP H0365239 U JPH0365239 U JP H0365239U JP 12663289 U JP12663289 U JP 12663289U JP 12663289 U JP12663289 U JP 12663289U JP H0365239 U JPH0365239 U JP H0365239U
Authority
JP
Japan
Prior art keywords
nozzle
gas
susceptor
ejecting
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12663289U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12663289U priority Critical patent/JPH0365239U/ja
Publication of JPH0365239U publication Critical patent/JPH0365239U/ja
Pending legal-status Critical Current

Links

JP12663289U 1989-10-31 1989-10-31 Pending JPH0365239U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12663289U JPH0365239U (enrdf_load_stackoverflow) 1989-10-31 1989-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12663289U JPH0365239U (enrdf_load_stackoverflow) 1989-10-31 1989-10-31

Publications (1)

Publication Number Publication Date
JPH0365239U true JPH0365239U (enrdf_load_stackoverflow) 1991-06-25

Family

ID=31674435

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12663289U Pending JPH0365239U (enrdf_load_stackoverflow) 1989-10-31 1989-10-31

Country Status (1)

Country Link
JP (1) JPH0365239U (enrdf_load_stackoverflow)

Similar Documents

Publication Publication Date Title
JPH0365239U (enrdf_load_stackoverflow)
JP2002512424A (ja) 保持リング、ターゲットおよびその製造のためのプロセス
JPH01134911A (ja) 縦形気相成長装置
JPS61172169U (enrdf_load_stackoverflow)
JP2000005894A (ja) 逆ひずみ付与装置
JP2792886B2 (ja) 化学気相成長装置
JPH0233270U (enrdf_load_stackoverflow)
JPH01140816U (enrdf_load_stackoverflow)
JPS6329929U (enrdf_load_stackoverflow)
JPH0530350Y2 (enrdf_load_stackoverflow)
JPS62180933U (enrdf_load_stackoverflow)
JPS6416632U (enrdf_load_stackoverflow)
JPH0374659U (enrdf_load_stackoverflow)
SU1579516A1 (ru) Сублимационный испаритель
JPS63140619U (enrdf_load_stackoverflow)
JPH0183073U (enrdf_load_stackoverflow)
JPH0341927U (enrdf_load_stackoverflow)
JPH0193728U (enrdf_load_stackoverflow)
JPS6251170U (enrdf_load_stackoverflow)
JPH02146165U (enrdf_load_stackoverflow)
JPH0299964U (enrdf_load_stackoverflow)
JPS6311575U (enrdf_load_stackoverflow)
JPS6393632U (enrdf_load_stackoverflow)
JPS61192443U (enrdf_load_stackoverflow)
JPS62148574U (enrdf_load_stackoverflow)