JPH02146165U - - Google Patents

Info

Publication number
JPH02146165U
JPH02146165U JP5432989U JP5432989U JPH02146165U JP H02146165 U JPH02146165 U JP H02146165U JP 5432989 U JP5432989 U JP 5432989U JP 5432989 U JP5432989 U JP 5432989U JP H02146165 U JPH02146165 U JP H02146165U
Authority
JP
Japan
Prior art keywords
wafer
vapor phase
epitaxial growth
reaction
phase epitaxial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5432989U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5432989U priority Critical patent/JPH02146165U/ja
Publication of JPH02146165U publication Critical patent/JPH02146165U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP5432989U 1989-05-11 1989-05-11 Pending JPH02146165U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5432989U JPH02146165U (enrdf_load_stackoverflow) 1989-05-11 1989-05-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5432989U JPH02146165U (enrdf_load_stackoverflow) 1989-05-11 1989-05-11

Publications (1)

Publication Number Publication Date
JPH02146165U true JPH02146165U (enrdf_load_stackoverflow) 1990-12-12

Family

ID=31576296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5432989U Pending JPH02146165U (enrdf_load_stackoverflow) 1989-05-11 1989-05-11

Country Status (1)

Country Link
JP (1) JPH02146165U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013521655A (ja) * 2010-03-03 2013-06-10 ビーコ・インストゥルメンツ・インコーポレイテッド 傾斜縁を有するウエハキャリア
CN105755450A (zh) * 2010-12-30 2016-07-13 维易科仪器公司 使用承载器扩展的晶圆加工

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013521655A (ja) * 2010-03-03 2013-06-10 ビーコ・インストゥルメンツ・インコーポレイテッド 傾斜縁を有するウエハキャリア
JP2016184742A (ja) * 2010-03-03 2016-10-20 ビーコ・インストゥルメンツ・インコーポレイテッド 傾斜縁を有するウエハキャリア
CN105755450A (zh) * 2010-12-30 2016-07-13 维易科仪器公司 使用承载器扩展的晶圆加工
US9938621B2 (en) 2010-12-30 2018-04-10 Veeco Instruments Inc. Methods of wafer processing with carrier extension
US10167554B2 (en) 2010-12-30 2019-01-01 Veeco Instruments Inc. Wafer processing with carrier extension

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