JPS63135965U - - Google Patents
Info
- Publication number
- JPS63135965U JPS63135965U JP2926287U JP2926287U JPS63135965U JP S63135965 U JPS63135965 U JP S63135965U JP 2926287 U JP2926287 U JP 2926287U JP 2926287 U JP2926287 U JP 2926287U JP S63135965 U JPS63135965 U JP S63135965U
- Authority
- JP
- Japan
- Prior art keywords
- material gas
- raw material
- gas supply
- reactor
- tungsten carbide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002994 raw material Substances 0.000 claims 10
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims 5
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 238000007599 discharging Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000005192 partition Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2926287U JPH0623564Y2 (ja) | 1987-02-28 | 1987-02-28 | タングステンカ−バイト層を形成する処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2926287U JPH0623564Y2 (ja) | 1987-02-28 | 1987-02-28 | タングステンカ−バイト層を形成する処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63135965U true JPS63135965U (enrdf_load_stackoverflow) | 1988-09-07 |
| JPH0623564Y2 JPH0623564Y2 (ja) | 1994-06-22 |
Family
ID=30832996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2926287U Expired - Lifetime JPH0623564Y2 (ja) | 1987-02-28 | 1987-02-28 | タングステンカ−バイト層を形成する処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0623564Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-02-28 JP JP2926287U patent/JPH0623564Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0623564Y2 (ja) | 1994-06-22 |
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